SYNOPSYS 光学设计软件课程四十二：复杂的干涉仪

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本课程介绍了设计干涉仪的步骤。 =Y0m;-1M  
干涉仪有两个通道，光束在分束器处叠加。 人们经常希望看到两个波前形状的差异，就像测试非球面镜时一样。 ^\%%9jY  
在该示例中，两个通道之间的条纹在其中一个反射镜的位置来回移动时给出光谱信息。 这种配置的仪器称为傅里叶变换干涉仪。 这里不关心波前的形状，而是关注其绝对相位。 s#3{c@^3  
我们将首先设置一个通道， 以下是第一步的输入：

ln7.>.F  
    RLE ;k]pq4E  
    ID INTERFEROMETER EXAMPLE ]W,g>91m  
    WAVL 4.6 4.25 3.9 L_|Y_=r."  
    OBB 0 1 30 0 0 0 30 In2D32"F  
    1 TH 100             ! DUMMY SURFACE FOR REFERENCE `R^VK-=C  
    2 AT -45 0 100       ! SCAN MIRROR e
F@E|kK  
    2 REFL P
2kZi=0  
    2    TH 0 Ygb#U'|  
    3    AT -45 0 100       ! FOLD AXIS l?~h_8&fT  
    3    TH -200            ! TO BEAMSPLITTER EzaOg|  
    4    TH -3 GTB U        ! THROUGH 3 MM THICK GERMANIUM wwz<c5  
    GE =%p{"<  
    5 REFL               ! REFLECT AT BEAMSPLITTER O
oNAW<  
    5 PTH -4 PIN 4       ! COMING BACK AGAIN r{
_'2Z_i  
    4 AT 30 0 100        ! TILT OF BEAMSPLITTER /^"TMm   
    7 AT 30 0 100        ! TILT AXIS bMYRQ,K`C  
    7    TH 70              ! TO REFERENCE MIRROR TXM.,5Dx\  
    8    REFL               ! HERE >KJ]\`2>)c  
    8    PTH -7             ! BACK TO BEAMSPLITTER /e\dsC{uJ  
    9    AT -30 0 100       ! ENTER IT AGAIN NINiX(  
    9    PTH 4 PIN 4        ! SAME SIZE AS BEFORE (Lp-3Xx  
    10    TH -.1            ! SMALL AIRSPACE .IgQn|N  
    11 PTH 4 PIN 4       ! COMPENSATOR DUPLICATES GEOMETRY >J1o@0tk  
    12 =zKp(_[D  
    13 AT 30 0 100       ! DUMMY TO FOLLOW BEAM I~I%z'"RQd  
    13 TH -200           ! DISTANCE TO FOLD MIRROR 1 -h}J%UV  
    14 AT -30 0 100      ! RIGHT HERE gE&f}M-  
    14 GID +Muyp]_  
    FOLD 1               ! IDENTIFY IT shB(kb{{  
    14    REFL              ! REFLECT THERE <~3 aaO  
    15    AT -30 0 100      ! DUMMY TO FOLLOW BEAM }|d:(*  
    15 TH 250            ! DISTANCE TO PRIMARY MIRROR ?#'
qY6 ^  
    16 RD -180 CC -1 TH -90  ! PARABOLOID HERE <|4j<U  
    16 REFL              ! REFLECT THERE !Zrvko  
    16    GID fiZ8s
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    PRIMARY M            ! IDENTIFY IT b#M<b.R)  
    17    AT 45 0 100       ! SMALL FOLD MIRROR h$!qb'|  
    17 REFL              ! REFLECT HERE jL# akV  
    17    GID DuWP)#kg  
    SECONDARY M          ! IDENTIFY IT {D@y-K5  
    18    AT 45 0 100       ! DUMMY TO FOLLOW BEAM C"}x=cK  
    18 TH 90             ! DISTANCE TO TERTIARY 2a^(8A`7W  
    19 RD -180 TH -350   ! DISTANCE TO FINAL IMAGE qz:OnQv!  
    19 REFL              ! REFLECT AT TERTIARY @P-7a`3*  
    APS 19               ! THE STOP IS HERE \?o%<c5{  
    19 GID `C1LR,J  
    TERTIARY M sM-*[Q=
_  
    20 G~PP1sf  
    END

/X?Nv^Hy  
    PANT [Xrq+O,  
    VY 19 ASPH dx~Wm1  
    END -nW{$&5AF  
    AANT ;9~z_orNQZ  
    GSR 0 1 4 P {`'b+0[;@  
    END _FV.}%W<u  
    SYNO 10

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    SYNOPSYS AI>ASY fkYQ3d,`  
jC oZm(bi  
     SPECIAL SURFACE DATA @.0,ka,X  
     ______________________________________________________________________________ yP-Dj ,  
      SURFACE NO.  16 -- CONIC SURFACE oeIS&O.K  
      CONIC CONSTANT (CC)     -1.000000 H\S,^)drJ?  
      SEMI-MAJOR AXIS (b) INFINITE       SEMI-MINOR AXIS (a) INFINITE 'fB`e]_  
<[q)2 5RL  
     _______________   SURFACE NO.  19 -- CONIC SURFACE   CONIC CONSTANT (CC)     -0.349174 B5cTzY.h-  
     SEMI-MAJOR AXIS (b)   -219.999999  SEMI-MINOR AXIS (a)    177.482393 qHj4`&  
(X8N?t
J  
     TILT AND DECENTER DATA Eg9502Bl~8  
     LEFT-HANDED COORDINATES RHxd6Gs"  
     _______________________________________________________________________________ r'8e"pTi  
     SURF TYPE            X            Y            Z     ALPHA      BETA     GAMMA k91Y"_&  
     _______________________________________________________________________________ RPrk]<<1  
    2    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 `XD$1>  
    3    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 2|cIu 'U  
    4    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 ~$cw]R58,9  
     7 REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 #8`G&S*  
     9 REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 acH.L_B:  
    13    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 %H@fVWe2wT  
    14    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 PQ5DTk  
    15    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 )KNFS,5  
    17 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 [:o#d`^  
    18 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 .B)v "Sw#  
     KEY TO SURFACE TYPES o%dtf5}(,  
     ____________________ wjl?@
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     GLB  GLOBAL COORDINATES                 LOC  LOCAL COORDINATES 7yc:=^ )  
     REL  RELATIVE COORDINATES               REM  REMOTE TILTS IN RELATIVE COORD. [AU1JO`\"  
     SYNOPSYS AI>

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    CHG !b7H  
    13 SIN            ! NEED TWO ADDITIONAL SURFACES "}!vYr
  
    13 SIN n_!&Wr^CX  
    4 NAS             ! REMOVE TILTS THERE NOW U3Q'ZT  
    7 NAS PvM<#zq_  
    9 NAS ZpZ~[BtQ  
    13 NAS X:dj5v  
    4 TH -3 GTB U iD\joh-C  
    GE cx$Oh`-Car  
    4    AT 30 0 100        ! TILT OF BEAMSPLITTER []Z6<rC|  
    5    TH -.1 TRANS LR^b
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    6    PTH 4 PIN 4 }vL[N~5\  
    7    TH 0 BG|Kw)z*KM  
    8    AT -30 0 100 w#o<qrpHf  
    8 TRANS             ! NOT REFLECTIVE ANYMORE :!|xg!|y  
    8    TH -70 EH[?*>+s  
    9    REFL $Fo ,$  
    9    PTH -8 AIR Wbc %G8  
    10    AT 30 0 100 Cjd +\7#G  
    10    PTH -4 PIN 4 o(a*Fk$  
    11    PTH -5  $%jV%k  
    12    REFL v\<`"  
    12    PTH 5 wU=(_S,c  
    13    PTH 4 PIN 4 14 TH 0 _[<I&^%  
    15 AT 30 0 100 ?GFVV->i  
    15 TH -200 END

R&-bA3w$  
    ACON 1 RpreW7B_Q*  
    HPLOT 1 a E#s#Kv   
    PER 0 0 0 1 123 R%ddB D\?  
    PUP 2 1 11 Wl*\kQ}U  
    PLOT 6=zme6D  
    RED 2Gj&7A3b  
    TRA P 0 0 11 4iKT  
    END 5ogbse"  
.Wr7?'D1M  
    ACON 2 Qdtfi1_Y1  
    APLOT 1 *z(.D\{%  
    PER 0 0 0 1 123 f>RPh bq|  
    PUP 2 1 11 aC:rrS  
    PLOT '; qT
 
    BLUE ZGS=;jM  
    TRA P 0 0 11 pIh@!C  
    END