SYNOPSYS 光学设计软件课程四十二：复杂的干涉仪

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本课程介绍了设计干涉仪的步骤。 =xI'|%  
干涉仪有两个通道，光束在分束器处叠加。 人们经常希望看到两个波前形状的差异，就像测试非球面镜时一样。 /;Tc]  
在该示例中，两个通道之间的条纹在其中一个反射镜的位置来回移动时给出光谱信息。 这种配置的仪器称为傅里叶变换干涉仪。 这里不关心波前的形状，而是关注其绝对相位。 g8%O^)d=>  
我们将首先设置一个通道， 以下是第一步的输入：

\7/yWd{N$  
    RLE -y+>^45  
    ID INTERFEROMETER EXAMPLE P#~B@d  
    WAVL 4.6 4.25 3.9 p?rl
x#M  
    OBB 0 1 30 0 0 0 30 ilL0=[2  
    1 TH 100             ! DUMMY SURFACE FOR REFERENCE [!A[oK9i C  
    2 AT -45 0 100       ! SCAN MIRROR +JU, ^A#X  
    2 REFL MCT1ZZpPr  
    2    TH 0 [s{
!  
    3    AT -45 0 100       ! FOLD AXIS 7mi!yTr}  
    3    TH -200            ! TO BEAMSPLITTER }p7iv:P=3  
    4    TH -3 GTB U        ! THROUGH 3 MM THICK GERMANIUM { :tO RF  
    GE H0Pxw P>q  
    5 REFL               ! REFLECT AT BEAMSPLITTER 2ndn8_l  
    5 PTH -4 PIN 4       ! COMING BACK AGAIN cqNK`3:.j  
    4 AT 30 0 100        ! TILT OF BEAMSPLITTER (8JU!lin  
    7 AT 30 0 100        ! TILT AXIS ~.m<`~u  
    7    TH 70              ! TO REFERENCE MIRROR #dA$k+3  
    8    REFL               ! HERE $E\|\g  
    8    PTH -7             ! BACK TO BEAMSPLITTER RwWg:4  
    9    AT -30 0 100       ! ENTER IT AGAIN @Iv;y*y  
    9    PTH 4 PIN 4        ! SAME SIZE AS BEFORE >d2Fa4u3  
    10    TH -.1            ! SMALL AIRSPACE @LKQ-<dZG  
    11 PTH 4 PIN 4       ! COMPENSATOR DUPLICATES GEOMETRY yLX $SR  
    12 Ic#xz;elM  
    13 AT 30 0 100       ! DUMMY TO FOLLOW BEAM @^W`Yg)C  
    13 TH -200           ! DISTANCE TO FOLD MIRROR 1 Pd*[i7zhC  
    14 AT -30 0 100      ! RIGHT HERE )u)=@@k21  
    14 GID V)`2Kw  
    FOLD 1               ! IDENTIFY IT hArY$T&MB  
    14    REFL              ! REFLECT THERE |7s2xRc  
    15    AT -30 0 100      ! DUMMY TO FOLLOW BEAM W7i|uTM  
    15 TH 250            ! DISTANCE TO PRIMARY MIRROR @c3xUK  
    16 RD -180 CC -1 TH -90  ! PARABOLOID HERE 'YNaLZ20  
    16 REFL              ! REFLECT THERE iq(PC3e`V  
    16    GID Sjpx G@k  
    PRIMARY M            ! IDENTIFY IT *U?O4E9  
    17    AT 45 0 100       ! SMALL FOLD MIRROR +2~kHrv  
    17 REFL              ! REFLECT HERE ?{{w[U6NE  
    17    GID T #\  
    SECONDARY M          ! IDENTIFY IT X*8y"~X|vq  
    18    AT 45 0 100       ! DUMMY TO FOLLOW BEAM qLN^9PdEE  
    18 TH 90             ! DISTANCE TO TERTIARY d8j1L/e  
    19 RD -180 TH -350   ! DISTANCE TO FINAL IMAGE _kj]vbG^;  
    19 REFL              ! REFLECT AT TERTIARY >H2`4]4]  
    APS 19               ! THE STOP IS HERE q+ $6D;9  
    19 GID *T|B'80  
    TERTIARY M )O]T}eI  
    20 Hcq.Lq;2:  
    END

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    PANT _FLEz|%~  
    VY 19 ASPH hRcb}>pr  
    END Y::0v@&(  
    AANT gV_/
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    GSR 0 1 4 P
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    END yVd^A2  
    SYNO 10

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    SYNOPSYS AI>ASY \U~4b_a
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jcH@*c=%e  
     SPECIAL SURFACE DATA CT|+?  
     ______________________________________________________________________________ h6 \P&Z  
      SURFACE NO.  16 -- CONIC SURFACE ;t`  ?|  
      CONIC CONSTANT (CC)     -1.000000 AKNx~!%2  
      SEMI-MAJOR AXIS (b) INFINITE       SEMI-MINOR AXIS (a) INFINITE XC4Z,,ah"  
!*IMWm>  
     _______________   SURFACE NO.  19 -- CONIC SURFACE   CONIC CONSTANT (CC)     -0.349174 \u3\TJ  
     SEMI-MAJOR AXIS (b)   -219.999999  SEMI-MINOR AXIS (a)    177.482393 X|M!Nt0'  
Qy,^'fSN  
     TILT AND DECENTER DATA ));#oQol9  
     LEFT-HANDED COORDINATES 7p&jSOY  
     _______________________________________________________________________________ ;|N:FG  
     SURF TYPE            X            Y            Z     ALPHA      BETA     GAMMA ) "#'  
     _______________________________________________________________________________ "}]`64?  
    2    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 cH]tZ$E`  
    3    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 T:|/ux3  
    4    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 ZO}Og&%  
     7 REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 snV*gSUH
 
     9 REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 /YKd [RQ  
    13    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 8Of
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    14    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 yoi4w 7:  
    15    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 D-3[#~MV  
    17 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 ]n ?x tI  
    18 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 ijI/z5  
     KEY TO SURFACE TYPES 3JoY
-  
     ____________________ bP,<^zA|X  
     GLB  GLOBAL COORDINATES                 LOC  LOCAL COORDINATES \?:L>-&h8  
     REL  RELATIVE COORDINATES               REM  REMOTE TILTS IN RELATIVE COORD. w7nt $L5  
     SYNOPSYS AI>

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    CHG -H1=N  
    13 SIN            ! NEED TWO ADDITIONAL SURFACES E3L?6Q
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    13 SIN a(Y'C`x
 
    4 NAS             ! REMOVE TILTS THERE NOW fJ,N.O+9E  
    7 NAS N&8TG  
    9 NAS KuNLu31%  
    13 NAS LyUn!zV$(  
    4 TH -3 GTB U ;'!x  
    GE A#uU]S  
    4    AT 30 0 100        ! TILT OF BEAMSPLITTER w$gvgz  
    5    TH -.1 TRANS e r" w{  
    6    PTH 4 PIN 4 (su,=Z  
    7    TH 0 y48]|%73  
    8    AT -30 0 100 L aTcBcI  
    8 TRANS             ! NOT REFLECTIVE ANYMORE pA7-B>Y  
    8    TH -70 Y~~Dg?e  
    9    REFL :WhJDx`j  
    9    PTH -8 AIR 6K2e]r  
    10    AT 30 0 100 D6SUzI1+H  
    10    PTH -4 PIN 4 ?z ,!iK`  
    11    PTH -5 w+o5iPLX  
    12    REFL .soCU8i3  
    12    PTH 5 {%jAp11y+O  
    13    PTH 4 PIN 4 14 TH 0 Z[vx0[av&  
    15 AT 30 0 100 uf(ayDE  
    15 TH -200 END

;qx#]Z0 <  
    ACON 1 Rq4;{a/j  
    HPLOT 1 MB}nn&u#  
    PER 0 0 0 1 123 LPs%^*8(2  
    PUP 2 1 11 ?2<QoS  
    PLOT HKN|pO3v  
    RED IrwQ~z3I  
    TRA P 0 0 11 Jcw^
Z,  
    END egmUUuO  
7T[~~V^x  
    ACON 2 OqGp|`  
    APLOT 1 sA0Ho6  
    PER 0 0 0 1 123 0AZ9I!&i  
    PUP 2 1 11 m l`xLZN>L  
    PLOT o<g?*"TRh  
    BLUE D#jwI,n}x  
    TRA P 0 0 11 b3NIFKw  
    END