SYNOPSYS 光学设计软件课程四十二：复杂的干涉仪

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本课程介绍了设计干涉仪的步骤。 =k##*%  
干涉仪有两个通道，光束在分束器处叠加。 人们经常希望看到两个波前形状的差异，就像测试非球面镜时一样。 j026CVL  
在该示例中，两个通道之间的条纹在其中一个反射镜的位置来回移动时给出光谱信息。 这种配置的仪器称为傅里叶变换干涉仪。 这里不关心波前的形状，而是关注其绝对相位。 x{9$4d  
我们将首先设置一个通道， 以下是第一步的输入：

,*Wp$  
    RLE !112u#V  
    ID INTERFEROMETER EXAMPLE NfND@m{/  
    WAVL 4.6 4.25 3.9 q+{yv  
    OBB 0 1 30 0 0 0 30 z LZHVvL3  
    1 TH 100             ! DUMMY SURFACE FOR REFERENCE :4[_&]H  
    2 AT -45 0 100       ! SCAN MIRROR JQ9+kZ  
    2 REFL j9f[){m`  
    2    TH 0 g5lK&-yu]  
    3    AT -45 0 100       ! FOLD AXIS ?D['>Rzu  
    3    TH -200            ! TO BEAMSPLITTER Wn&9R j  
    4    TH -3 GTB U        ! THROUGH 3 MM THICK GERMANIUM
[BKOK7QK|  
    GE K)GpQ|4:<  
    5 REFL               ! REFLECT AT BEAMSPLITTER -FQc_k?VF  
    5 PTH -4 PIN 4       ! COMING BACK AGAIN gf70 O
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    4 AT 30 0 100        ! TILT OF BEAMSPLITTER A@jBn6  
    7 AT 30 0 100        ! TILT AXIS 2Ws'3Jz  
    7    TH 70              ! TO REFERENCE MIRROR rm4t  
    8    REFL               ! HERE uTNy{RBD+  
    8    PTH -7             ! BACK TO BEAMSPLITTER dpcU`$kt  
    9    AT -30 0 100       ! ENTER IT AGAIN RmJ|g<  
    9    PTH 4 PIN 4        ! SAME SIZE AS BEFORE Uj^Y\w-@Z  
    10    TH -.1            ! SMALL AIRSPACE %e+{wU}w?2  
    11 PTH 4 PIN 4       ! COMPENSATOR DUPLICATES GEOMETRY !*PX
-  
    12 ]-jaIvM  
    13 AT 30 0 100       ! DUMMY TO FOLLOW BEAM 8@r>`c  
    13 TH -200           ! DISTANCE TO FOLD MIRROR 1
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    14 AT -30 0 100      ! RIGHT HERE 00pe4^U  
    14 GID q@i.4>x  
    FOLD 1               ! IDENTIFY IT ]0=THq\H  
    14    REFL              ! REFLECT THERE _7<G6q2(  
    15    AT -30 0 100      ! DUMMY TO FOLLOW BEAM F%$lcQ04%  
    15 TH 250            ! DISTANCE TO PRIMARY MIRROR IwR=@Ne8  
    16 RD -180 CC -1 TH -90  ! PARABOLOID HERE *1h@Jb34  
    16 REFL              ! REFLECT THERE m@"p#pt(_  
    16    GID wcW7k(+0  
    PRIMARY M            ! IDENTIFY IT }ISR +./+  
    17    AT 45 0 100       ! SMALL FOLD MIRROR kW&zkE{  
    17 REFL              ! REFLECT HERE nPhREn!  
    17    GID (@Eb+8Zd  
    SECONDARY M          ! IDENTIFY IT qdo_YPG  
    18    AT 45 0 100       ! DUMMY TO FOLLOW BEAM 4iY <7l8  
    18 TH 90             ! DISTANCE TO TERTIARY lL&p?MUp  
    19 RD -180 TH -350   ! DISTANCE TO FINAL IMAGE Y4N)yMSl"  
    19 REFL              ! REFLECT AT TERTIARY e#@u&+K/f  
    APS 19               ! THE STOP IS HERE ?ZYj5[op,H  
    19 GID 0%qM`KZC  
    TERTIARY M Sg1,9[pb  
    20 .}Hs'co  
    END

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    PANT -^t&U] g  
    VY 19 ASPH o3HS|  
    END !L)yI#i4C  
    AANT jV' tcFr4  
    GSR 0 1 4 P 0oo_m6ie&  
    END G{0
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    SYNO 10

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    SYNOPSYS AI>ASY (, $Lp0mB7  
|T{ZDJ+  
     SPECIAL SURFACE DATA w[J.?v&^  
     ______________________________________________________________________________ 7eG@)5Uy  
      SURFACE NO.  16 -- CONIC SURFACE Tvw(Sq};  
      CONIC CONSTANT (CC)     -1.000000 |UN#utw{^Y  
      SEMI-MAJOR AXIS (b) INFINITE       SEMI-MINOR AXIS (a) INFINITE }3R
:7N`,|  
l#a*w  
     _______________   SURFACE NO.  19 -- CONIC SURFACE   CONIC CONSTANT (CC)     -0.349174 i8.OM*[f  
     SEMI-MAJOR AXIS (b)   -219.999999  SEMI-MINOR AXIS (a)    177.482393 Y{L|ja%9?  
xI8v'[3  
     TILT AND DECENTER DATA d4o_/[  
     LEFT-HANDED COORDINATES sNJ?Z"5k1h  
     _______________________________________________________________________________ Jo9c|\4  
     SURF TYPE            X            Y            Z     ALPHA      BETA     GAMMA ihIRB9  
     _______________________________________________________________________________ cyWDtq  
    2    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 \8`^QgV`@  
    3    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 -;$jo-  
    4    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 q[+V6n`Z5  
     7 REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 cd$,,  
     9 REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 S.^x)5/,,T  
    13    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 %Gm4,+8P3o  
    14    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 i>;6Z s>S  
    15    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 3,Bm"'b6  
    17 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 =GLMdhD]  
    18 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 tfjbG;R  
     KEY TO SURFACE TYPES !DeU8.%  
     ____________________ r`C t/]c  
     GLB  GLOBAL COORDINATES                 LOC  LOCAL COORDINATES #e6x_o|  
     REL  RELATIVE COORDINATES               REM  REMOTE TILTS IN RELATIVE COORD. osTin*T.  
     SYNOPSYS AI>

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    CHG DkBVk+  
    13 SIN            ! NEED TWO ADDITIONAL SURFACES l%7^'nDn  
    13 SIN Wl3fR[@3Q  
    4 NAS             ! REMOVE TILTS THERE NOW < !]7Gt  
    7 NAS ~T&X#i  
    9 NAS KQ.cd]6  
    13 NAS NjSjE_S2B8  
    4 TH -3 GTB U ;\t(

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    GE Dz+R Q`Vn  
    4    AT 30 0 100        ! TILT OF BEAMSPLITTER %$F\o1S  
    5    TH -.1 TRANS J+*n}He,  
    6    PTH 4 PIN 4 m ,TYF  
    7    TH 0 BO;LK-V
 
    8    AT -30 0 100 DJHE6XJ   
    8 TRANS             ! NOT REFLECTIVE ANYMORE !_h<w?)  
    8    TH -70 YQ5d!a.  
    9    REFL fhe%5#3  
    9    PTH -8 AIR k!m9 l1x  
    10    AT 30 0 100 H/O
v8|  
    10    PTH -4 PIN 4 |C;*GeyS;J  
    11    PTH -5 q.PXO3T  
    12    REFL ,U'E!?=:VS  
    12    PTH 5 u1(8a%ZC  
    13    PTH 4 PIN 4 14 TH 0 )"<:Md$7  
    15 AT 30 0 100 S|ADu]H(  
    15 TH -200 END

?:sQ]S/Er  
    ACON 1 !u|s|6{\  
    HPLOT 1 Toc="F`SW  
    PER 0 0 0 1 123 l%$co07cX  
    PUP 2 1 11 Mhze!!  
    PLOT FcZ)_m6m  
    RED MM4Eq>F/  
    TRA P 0 0 11 e5fzV.'5  
    END n7K\\|X  
d!]_n|B@9  
    ACON 2 L<TL6  
    APLOT 1 a]_eSU@  
    PER 0 0 0 1 123 viR-h iD  
    PUP 2 1 11 /|{~GD +A&  
    PLOT 1]Gp\P}  
    BLUE S`GM#(t@_  
    TRA P 0 0 11 w.\#!@kZ!  
    END