SYNOPSYS 光学设计软件课程四十二：复杂的干涉仪

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本课程介绍了设计干涉仪的步骤。 Rn)fwGC  
干涉仪有两个通道，光束在分束器处叠加。 人们经常希望看到两个波前形状的差异，就像测试非球面镜时一样。 s|I$c;>  
在该示例中，两个通道之间的条纹在其中一个反射镜的位置来回移动时给出光谱信息。 这种配置的仪器称为傅里叶变换干涉仪。 这里不关心波前的形状，而是关注其绝对相位。 _2hZGC%&E  
我们将首先设置一个通道， 以下是第一步的输入：

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    RLE |w{C!Q8l  
    ID INTERFEROMETER EXAMPLE (8~D^N6Z  
    WAVL 4.6 4.25 3.9 zkquXzlgB  
    OBB 0 1 30 0 0 0 30 3$S~!fh  
    1 TH 100             ! DUMMY SURFACE FOR REFERENCE 7AlL,&+  
    2 AT -45 0 100       ! SCAN MIRROR Hb/8X !=  
    2 REFL Rg^ps  
    2    TH 0 l6zYiM  
    3    AT -45 0 100       ! FOLD AXIS Xzl$Qc  
    3    TH -200            ! TO BEAMSPLITTER a"`>J!  
    4    TH -3 GTB U        ! THROUGH 3 MM THICK GERMANIUM >pp#>{}  
    GE -@ra~li,yQ  
    5 REFL               ! REFLECT AT BEAMSPLITTER OZA^L;#>  
    5 PTH -4 PIN 4       ! COMING BACK AGAIN XRHngW_A  
    4 AT 30 0 100        ! TILT OF BEAMSPLITTER "L!U7|9J  
    7 AT 30 0 100        ! TILT AXIS xIwILY|W=  
    7    TH 70              ! TO REFERENCE MIRROR eV~"T2!Sb  
    8    REFL               ! HERE uAV7T/'  
    8    PTH -7             ! BACK TO BEAMSPLITTER q0DRT4K  
    9    AT -30 0 100       ! ENTER IT AGAIN Y`(~eNX^%  
    9    PTH 4 PIN 4        ! SAME SIZE AS BEFORE pmOUl 8y4  
    10    TH -.1            ! SMALL AIRSPACE mHV{9J  
    11 PTH 4 PIN 4       ! COMPENSATOR DUPLICATES GEOMETRY i"xV=.  
    12 &H P g>  
    13 AT 30 0 100       ! DUMMY TO FOLLOW BEAM KMK8jJ  
    13 TH -200           ! DISTANCE TO FOLD MIRROR 1 .6C6ZUB;  
    14 AT -30 0 100      ! RIGHT HERE 3=^)=yOd  
    14 GID {9X mFa  
    FOLD 1               ! IDENTIFY IT QBGjH^kL  
    14    REFL              ! REFLECT THERE b(CO7/e>  
    15    AT -30 0 100      ! DUMMY TO FOLLOW BEAM |rG)Q0H,  
    15 TH 250            ! DISTANCE TO PRIMARY MIRROR )2#&l  
    16 RD -180 CC -1 TH -90  ! PARABOLOID HERE gcB hEw  
    16 REFL              ! REFLECT THERE IUDH"~f  
    16    GID i]J.WFu  
    PRIMARY M            ! IDENTIFY IT ^G2M4+W|  
    17    AT 45 0 100       ! SMALL FOLD MIRROR _C(fz CK  
    17 REFL              ! REFLECT HERE k5J18S  
    17    GID *8uS,s6g  
    SECONDARY M          ! IDENTIFY IT a+\<2NXYD  
    18    AT 45 0 100       ! DUMMY TO FOLLOW BEAM cTS.yN({G  
    18 TH 90             ! DISTANCE TO TERTIARY 5IOGH*'U8  
    19 RD -180 TH -350   ! DISTANCE TO FINAL IMAGE Qc)i?Z'6  
    19 REFL              ! REFLECT AT TERTIARY TLp2a<Iy  
    APS 19               ! THE STOP IS HERE wy .96  
    19 GID Vo+.s#wN`h  
    TERTIARY M ?qi~
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    20
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    END

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    PANT PTLlLa85<  
    VY 19 ASPH ~,E }^  
    END qp/1tC`  
    AANT L6DYunh}^N  
    GSR 0 1 4 P S89j:KRXH%  
    END vz>9jw:Y  
    SYNO 10

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    SYNOPSYS AI>ASY E?czolNl  
4L ]4WVc  
     SPECIAL SURFACE DATA hc[J,yG  
     ______________________________________________________________________________ Maq`Or|4  
      SURFACE NO.  16 -- CONIC SURFACE LTo5v  
      CONIC CONSTANT (CC)     -1.000000 W]DGt|JP  
      SEMI-MAJOR AXIS (b) INFINITE       SEMI-MINOR AXIS (a) INFINITE [@5cYeW3.  
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     _______________   SURFACE NO.  19 -- CONIC SURFACE   CONIC CONSTANT (CC)     -0.349174 cTzR<Yr  
     SEMI-MAJOR AXIS (b)   -219.999999  SEMI-MINOR AXIS (a)    177.482393 "uT2 DY[  
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     TILT AND DECENTER DATA 4H%#Sn#L^!  
     LEFT-HANDED COORDINATES ej@4jpHQN  
     _______________________________________________________________________________ <5}I6R;  
     SURF TYPE            X            Y            Z     ALPHA      BETA     GAMMA 9#:fQ!3`  
     _______________________________________________________________________________ nW"O+s3  
    2    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 OylUuYy~j  
    3    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 ]Idwy|eG  
    4    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 ybqmPT'|_  
     7 REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 pfHjs3A=  
     9 REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 LH)1IGAx2y  
    13    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 *?d\Zcj85[  
    14    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 JbL3/h]  
    15    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 sR>>l3H
 
    17 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 Yl>Y.SO  
    18 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 O/FI>RT\H  
     KEY TO SURFACE TYPES 
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     ____________________ /g!
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     GLB  GLOBAL COORDINATES                 LOC  LOCAL COORDINATES 6H: f
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     REL  RELATIVE COORDINATES               REM  REMOTE TILTS IN RELATIVE COORD. V0Oqq0\  
     SYNOPSYS AI>

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    CHG u&uFXOc'  
    13 SIN            ! NEED TWO ADDITIONAL SURFACES {6h 1  
    13 SIN L(K 5f7\  
    4 NAS             ! REMOVE TILTS THERE NOW h)ZqZ'k$  
    7 NAS %L-qAI&V  
    9 NAS {*F =&D  
    13 NAS TP {\V>*Yz  
    4 TH -3 GTB U mj e9i  
    GE J&fIWZ  
    4    AT 30 0 100        ! TILT OF BEAMSPLITTER 1E /G+pm  
    5    TH -.1 TRANS W)bSLD   
    6    PTH 4 PIN 4 0$c(<+D  
    7    TH 0 A03io8D6  
    8    AT -30 0 100 yP# Y:s  
    8 TRANS             ! NOT REFLECTIVE ANYMORE )
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    8    TH -70 ;lb  
    9    REFL ]r0j  
    9    PTH -8 AIR keRLai7h  
    10    AT 30 0 100 He'VqUw_  
    10    PTH -4 PIN 4 X"d"a={]  
    11    PTH -5 #J3o~,t<  
    12    REFL J-'XT_k:iM  
    12    PTH 5 }:c~5whN  
    13    PTH 4 PIN 4 14 TH 0 qMVuFwPhi  
    15 AT 30 0 100 7r'_p$  
    15 TH -200 END

LH_H yP_  
    ACON 1 Qd YYWD   
    HPLOT 1 JD0s0>q_  
    PER 0 0 0 1 123 i&lW&]  
    PUP 2 1 11 :{)uD ;  
    PLOT ;f[##=tm  
    RED '+{yg+#/wV  
    TRA P 0 0 11 $Ugc:L<h+  
    END ~K#
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*9r(lmrfj  
    ACON 2 Uv>e :U7;  
    APLOT 1 //|B?4kk  
    PER 0 0 0 1 123 HP_h!pvx  
    PUP 2 1 11 PVF:p7  
    PLOT ZT*}KJm  
    BLUE 0n6eWwY  
    TRA P 0 0 11 S@3`H8 [  
    END