SYNOPSYS 光学设计软件课程四十二：复杂的干涉仪

-{}(U  
M"Af_Pbx  
本课程介绍了设计干涉仪的步骤。 IL`LIJ:O  
干涉仪有两个通道，光束在分束器处叠加。 人们经常希望看到两个波前形状的差异，就像测试非球面镜时一样。 
J&Db-  
在该示例中，两个通道之间的条纹在其中一个反射镜的位置来回移动时给出光谱信息。 这种配置的仪器称为傅里叶变换干涉仪。 这里不关心波前的形状，而是关注其绝对相位。 bl
Ll1Ak  
我们将首先设置一个通道， 以下是第一步的输入：

<&^[?FdAa  
    RLE &pf"35ll  
    ID INTERFEROMETER EXAMPLE GEvx<:  
    WAVL 4.6 4.25 3.9 .]H/u "d  
    OBB 0 1 30 0 0 0 30 4{Q$^wD+.  
    1 TH 100             ! DUMMY SURFACE FOR REFERENCE kbL7Xjk  
    2 AT -45 0 100       ! SCAN MIRROR Ee_?aG e&  
    2 REFL =0L%<@yA  
    2    TH 0 ScjeAC)  
    3    AT -45 0 100       ! FOLD AXIS G1-r$7\  
    3    TH -200            ! TO BEAMSPLITTER ^OV!Q\j.q  
    4    TH -3 GTB U        ! THROUGH 3 MM THICK GERMANIUM P*jiz@6  
    GE d~MY z6"  
    5 REFL               ! REFLECT AT BEAMSPLITTER ,SPgop'  
    5 PTH -4 PIN 4       ! COMING BACK AGAIN *s#6e}  
    4 AT 30 0 100        ! TILT OF BEAMSPLITTER 4X",:B}  
    7 AT 30 0 100        ! TILT AXIS ZbiC=uh  
    7    TH 70              ! TO REFERENCE MIRROR ,RDWx  
    8    REFL               ! HERE A;5_/ 2  
    8    PTH -7             ! BACK TO BEAMSPLITTER cNT !}8h^  
    9    AT -30 0 100       ! ENTER IT AGAIN ZeY|JH1  
    9    PTH 4 PIN 4        ! SAME SIZE AS BEFORE ,na}' A@a`  
    10    TH -.1            ! SMALL AIRSPACE MQDLC7Y.p5  
    11 PTH 4 PIN 4       ! COMPENSATOR DUPLICATES GEOMETRY ,{\Ae"{6  
    12 '4It>50b  
    13 AT 30 0 100       ! DUMMY TO FOLLOW BEAM ^62z\Y  
    13 TH -200           ! DISTANCE TO FOLD MIRROR 1 {Mj- $G"  
    14 AT -30 0 100      ! RIGHT HERE TQ:h[6v  
    14 GID [m4M#Lg\0  
    FOLD 1               ! IDENTIFY IT =E$bZe8  
    14    REFL              ! REFLECT THERE |Eh2#K0x4G  
    15    AT -30 0 100      ! DUMMY TO FOLLOW BEAM AOkG.u-k  
    15 TH 250            ! DISTANCE TO PRIMARY MIRROR !vSq?!y6*P  
    16 RD -180 CC -1 TH -90  ! PARABOLOID HERE mZXtHFMu  
    16 REFL              ! REFLECT THERE iITMBS`}  
    16    GID w#hg_RK(Jr  
    PRIMARY M            ! IDENTIFY IT R|^bZf^  
    17    AT 45 0 100       ! SMALL FOLD MIRROR V;g) P  
    17 REFL              ! REFLECT HERE ).`v&-cK4E  
    17    GID lxCAZa\  
    SECONDARY M          ! IDENTIFY IT S,C c0)j>  
    18    AT 45 0 100       ! DUMMY TO FOLLOW BEAM o=#ym4hJ%  
    18 TH 90             ! DISTANCE TO TERTIARY +*xc4  
    19 RD -180 TH -350   ! DISTANCE TO FINAL IMAGE #?+[|RS|  
    19 REFL              ! REFLECT AT TERTIARY j/Y]3RSMp  
    APS 19               ! THE STOP IS HERE GqNOWK2O  
    19 GID
Yyar{$he  
    TERTIARY M pouXt-%2X  
    20 <KK.f9^o(  
    END

glc<(V  
    PANT mn=b&{')e  
    VY 19 ASPH M%la@2SK=  
    END 6]Q#4  
    AANT si)>:e  
    GSR 0 1 4 P hr&&b3W3p  
    END b{,v?7^4  
    SYNO 10

X`EVjK  
    SYNOPSYS AI>ASY 
d(XOZF  
l`l6Y>c*]  
     SPECIAL SURFACE DATA ?%su?L  
     ______________________________________________________________________________ |c8\alw  
      SURFACE NO.  16 -- CONIC SURFACE JIw?]xa*  
      CONIC CONSTANT (CC)     -1.000000 Y3~z#<  
      SEMI-MAJOR AXIS (b) INFINITE       SEMI-MINOR AXIS (a) INFINITE J)yg<*/3  
d (x'\4(K  
     _______________   SURFACE NO.  19 -- CONIC SURFACE   CONIC CONSTANT (CC)     -0.349174 AG}j'   
     SEMI-MAJOR AXIS (b)   -219.999999  SEMI-MINOR AXIS (a)    177.482393 ;-JFb$m  
S[q:b .  
     TILT AND DECENTER DATA rr2!H%:
 
     LEFT-HANDED COORDINATES 6it [i@*"  
     _______________________________________________________________________________ [<{r~YFjWW  
     SURF TYPE            X            Y            Z     ALPHA      BETA     GAMMA @[?ZwzY:9  
     _______________________________________________________________________________ vf@j d}?  
    2    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 M*qE)dZjS  
    3    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 ~]RfOpq^w  
    4    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 `p9N| V  
     7 REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 1kpw*$P0  
     9 REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 j;b>~_ U%  
    13    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 %*!6R:gAp  
    14    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000
) 3"!Q+  
    15    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 i!8"
T#  
    17 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 Vt3*~Beb  
    18 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 .)+c01  
     KEY TO SURFACE TYPES pZeOdh  
     ____________________ -`{W~yz  
     GLB  GLOBAL COORDINATES                 LOC  LOCAL COORDINATES ilVi  
     REL  RELATIVE COORDINATES               REM  REMOTE TILTS IN RELATIVE COORD. MZX)znO  
     SYNOPSYS AI>

`Mt|+iT$p  
    CHG j;E$7QH[  
    13 SIN            ! NEED TWO ADDITIONAL SURFACES T%&vq6  
    13 SIN Yb`b/BMR  
    4 NAS             ! REMOVE TILTS THERE NOW z9OpMA  
    7 NAS F(."nUrf  
    9 NAS z8'zH>  
    13 NAS m:`M&Xs&  
    4 TH -3 GTB U =H23eOS_#  
    GE "OYD9Q''  
    4    AT 30 0 100        ! TILT OF BEAMSPLITTER k7rg:P  
    5    TH -.1 TRANS "0Z/|&  
    6    PTH 4 PIN 4 6'N_bNW  
    7    TH 0 'dh{q`#0  
    8    AT -30 0 100 Rvu5#_P  
    8 TRANS             ! NOT REFLECTIVE ANYMORE HyWR&0J  
    8    TH -70 onRTX|#  
    9    REFL HBvyX`-  
    9    PTH -8 AIR w.aEc}@(^  
    10    AT 30 0 100 u0arJU_.)  
    10    PTH -4 PIN 4 &dWGa+e  
    11    PTH -5 tbR  
    12    REFL F.a
G7  
    12    PTH 5 1aIGC9xQ`  
    13    PTH 4 PIN 4 14 TH 0 YJHb\Cf.  
    15 AT 30 0 100 $ -<(geI  
    15 TH -200 END

!',%kvJI  
    ACON 1 &xB9;v3
 
    HPLOT 1 oz.z>+Q  
    PER 0 0 0 1 123 4.wrY6+V  
    PUP 2 1 11 6pS}\aD  
    PLOT ]nebL{}5  
    RED 56c[$ q  
    TRA P 0 0 11 _<mY|  
    END 'v0rnIsI?  
`W@jo~y<  
    ACON 2 !idVF!xG  
    APLOT 1 ;T0X7MNx  
    PER 0 0 0 1 123 ohx$;j  
    PUP 2 1 11 @J5TDq @  
    PLOT U _A'/p^D  
    BLUE 1Dhe! n#  
    TRA P 0 0 11 xFThs,w  
    END