SYNOPSYS 光学设计软件课程四十二：复杂的干涉仪

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本课程介绍了设计干涉仪的步骤。 ]LvpYRU$P  
干涉仪有两个通道，光束在分束器处叠加。 人们经常希望看到两个波前形状的差异，就像测试非球面镜时一样。 zU+` o?al  
在该示例中，两个通道之间的条纹在其中一个反射镜的位置来回移动时给出光谱信息。 这种配置的仪器称为傅里叶变换干涉仪。 这里不关心波前的形状，而是关注其绝对相位。 7p}.r J54  
我们将首先设置一个通道， 以下是第一步的输入：

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    RLE '`$US;5  
    ID INTERFEROMETER EXAMPLE GC{)3)_ t  
    WAVL 4.6 4.25 3.9 mUj=NRq  
    OBB 0 1 30 0 0 0 30 ZaCUc Px  
    1 TH 100             ! DUMMY SURFACE FOR REFERENCE );LkEXC_'  
    2 AT -45 0 100       ! SCAN MIRROR w$JG:y#  
    2 REFL SX$Nef9p  
    2    TH 0 WQ\H2go  
    3    AT -45 0 100       ! FOLD AXIS ZMSP8(V  
    3    TH -200            ! TO BEAMSPLITTER ToUeX
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    4    TH -3 GTB U        ! THROUGH 3 MM THICK GERMANIUM ^&o38=70*  
    GE W$x'+t5H  
    5 REFL               ! REFLECT AT BEAMSPLITTER DU6AlNx  
    5 PTH -4 PIN 4       ! COMING BACK AGAIN C+
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    4 AT 30 0 100        ! TILT OF BEAMSPLITTER |[k/%  
    7 AT 30 0 100        ! TILT AXIS wIW]uo/=  
    7    TH 70              ! TO REFERENCE MIRROR * /S=9n0  
    8    REFL               ! HERE >Q0HqOq  
    8    PTH -7             ! BACK TO BEAMSPLITTER x(e=@/qp  
    9    AT -30 0 100       ! ENTER IT AGAIN R@=Bk(h  
    9    PTH 4 PIN 4        ! SAME SIZE AS BEFORE v{ F/Bifo  
    10    TH -.1            ! SMALL AIRSPACE H];QDix?  
    11 PTH 4 PIN 4       ! COMPENSATOR DUPLICATES GEOMETRY Pg3O )
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    12 PvzB, 2":  
    13 AT 30 0 100       ! DUMMY TO FOLLOW BEAM J$)lYSNE  
    13 TH -200           ! DISTANCE TO FOLD MIRROR 1 mWUo:(U  
    14 AT -30 0 100      ! RIGHT HERE &j@i>(7  
    14 GID R3]Ra&h6N)  
    FOLD 1               ! IDENTIFY IT LoHL}1BG-  
    14    REFL              ! REFLECT THERE jgLCs)=5hV  
    15    AT -30 0 100      ! DUMMY TO FOLLOW BEAM ,q yp2Y7  
    15 TH 250            ! DISTANCE TO PRIMARY MIRROR 90%alG1>y  
    16 RD -180 CC -1 TH -90  ! PARABOLOID HERE 8oI)q4V  
    16 REFL              ! REFLECT THERE @u.
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    16    GID `P&L. m]|  
    PRIMARY M            ! IDENTIFY IT lGa'Y  
    17    AT 45 0 100       ! SMALL FOLD MIRROR Nl_Sgyx,\  
    17 REFL              ! REFLECT HERE .bh>_ W_h  
    17    GID 6x*u S~'  
    SECONDARY M          ! IDENTIFY IT sjLI^#a  
    18    AT 45 0 100       ! DUMMY TO FOLLOW BEAM em@\S  
    18 TH 90             ! DISTANCE TO TERTIARY `[JX}<~i  
    19 RD -180 TH -350   ! DISTANCE TO FINAL IMAGE rC>')`uk  
    19 REFL              ! REFLECT AT TERTIARY }.<%46_Z-  
    APS 19               ! THE STOP IS HERE f#:7$:{F1  
    19 GID W&[}-E8<Y  
    TERTIARY M 'kW'e  
    20 }e/P|7&  
    END

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    PANT n/_cJD\  
    VY 19 ASPH v%|()Z0  
    END }hOExTz  
    AANT T,h,)|:I^  
    GSR 0 1 4 P > m GO08X  
    END L3M
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    SYNO 10

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    SYNOPSYS AI>ASY irNGURLm  
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     SPECIAL SURFACE DATA 'vO+,-  
     ______________________________________________________________________________ ^a@Vn\V1  
      SURFACE NO.  16 -- CONIC SURFACE YcS}ug7  
      CONIC CONSTANT (CC)     -1.000000 (o,&P9  
      SEMI-MAJOR AXIS (b) INFINITE       SEMI-MINOR AXIS (a) INFINITE 8phcekh+  
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     _______________   SURFACE NO.  19 -- CONIC SURFACE   CONIC CONSTANT (CC)     -0.349174 6Cut[*lj^  
     SEMI-MAJOR AXIS (b)   -219.999999  SEMI-MINOR AXIS (a)    177.482393 6KmF 9  
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     TILT AND DECENTER DATA rvRtR/*?j  
     LEFT-HANDED COORDINATES G0Wzx)3]  
     _______________________________________________________________________________ NfcQB;0  
     SURF TYPE            X            Y            Z     ALPHA      BETA     GAMMA {#CyO b4  
     _______________________________________________________________________________ K,YKU?z6  
    2    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 iulM8"P  
    3    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 ]@bo;.  
    4    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 zO`54^  
     7 REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 UA3
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     9 REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 @p jah(i`  
    13    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 kStWsc$;+T  
    14    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 Dqu1!
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    15    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 E)%]?/w  
    17 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 (6p5Fo  
    18 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 }5^j08  
     KEY TO SURFACE TYPES hQrO8T?2  
     ____________________ DJlY~}v#_  
     GLB  GLOBAL COORDINATES                 LOC  LOCAL COORDINATES @W|}|V5  
     REL  RELATIVE COORDINATES               REM  REMOTE TILTS IN RELATIVE COORD. Y3jb'S4(  
     SYNOPSYS AI>

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    CHG 93:s[bmx  
    13 SIN            ! NEED TWO ADDITIONAL SURFACES ZWW:-3  
    13 SIN Owalt4}C  
    4 NAS             ! REMOVE TILTS THERE NOW Ftj3`Mu  
    7 NAS $H^hK0?'  
    9 NAS R,01.N( U  
    13 NAS /EhojODMF  
    4 TH -3 GTB U zEJ|;oL  
    GE ?lCKZm.,(-  
    4    AT 30 0 100        ! TILT OF BEAMSPLITTER 94"R&
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    5    TH -.1 TRANS ,WbO8#z+  
    6    PTH 4 PIN 4 .EGZv(rz&  
    7    TH 0 PL<q|y  
    8    AT -30 0 100 R%XbO~{u  
    8 TRANS             ! NOT REFLECTIVE ANYMORE nK Rx_D$d  
    8    TH -70 iUqL /  
    9    REFL XXacWdh \  
    9    PTH -8 AIR 3/o-\wWO  
    10    AT 30 0 100 j2"jCv  
    10    PTH -4 PIN 4 <R}(UK  
    11    PTH -5 zLuej'  
    12    REFL lKEdpF<  
    12    PTH 5 a;m-Vu!  
    13    PTH 4 PIN 4 14 TH 0 pm O}m>  
    15 AT 30 0 100 <T:u&Ic  
    15 TH -200 END

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    ACON 1 T<~NB5&f  
    HPLOT 1 I(ds]E ;_E  
    PER 0 0 0 1 123 XX~~SvSM  
    PUP 2 1 11 erYpeq.  
    PLOT K=VYRY  
    RED ]~CGzV  
    TRA P 0 0 11 /og2+!  
    END v"
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    ACON 2 $Ne$s
 
    APLOT 1 "zR+}  
    PER 0 0 0 1 123 ~oz8B^7i;  
    PUP 2 1 11 8$-(%  
    PLOT bl(rCbj(w  
    BLUE $/nU0W  
    TRA P 0 0 11 }
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    END