SYNOPSYS 光学设计软件课程四十二：复杂的干涉仪

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本课程介绍了设计干涉仪的步骤。 w
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干涉仪有两个通道，光束在分束器处叠加。 人们经常希望看到两个波前形状的差异，就像测试非球面镜时一样。 {LiJ=Ebt  
在该示例中，两个通道之间的条纹在其中一个反射镜的位置来回移动时给出光谱信息。 这种配置的仪器称为傅里叶变换干涉仪。 这里不关心波前的形状，而是关注其绝对相位。 Hpix:To  
我们将首先设置一个通道， 以下是第一步的输入：

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    RLE !U?C
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    ID INTERFEROMETER EXAMPLE c$1
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    WAVL 4.6 4.25 3.9 ]lA}5  
    OBB 0 1 30 0 0 0 30 |y7TYjg6  
    1 TH 100             ! DUMMY SURFACE FOR REFERENCE 1?QVtfwY  
    2 AT -45 0 100       ! SCAN MIRROR C
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    2 REFL oqvu8"  
    2    TH 0 Z><+4 '  
    3    AT -45 0 100       ! FOLD AXIS eM!Oc$C8[  
    3    TH -200            ! TO BEAMSPLITTER .*N,x(V  
    4    TH -3 GTB U        ! THROUGH 3 MM THICK GERMANIUM t?&;   
    GE gA=Pz[i)p  
    5 REFL               ! REFLECT AT BEAMSPLITTER #*:1Ch]B  
    5 PTH -4 PIN 4       ! COMING BACK AGAIN kmBA  
    4 AT 30 0 100        ! TILT OF BEAMSPLITTER z@UH[>^gj  
    7 AT 30 0 100        ! TILT AXIS fUvXb>f,  
    7    TH 70              ! TO REFERENCE MIRROR ,sj(g/hg  
    8    REFL               ! HERE N#-%b"(  
    8    PTH -7             ! BACK TO BEAMSPLITTER 4%}iKoT   
    9    AT -30 0 100       ! ENTER IT AGAIN 5n>zJ ~  
    9    PTH 4 PIN 4        ! SAME SIZE AS BEFORE DPY+{5
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    10    TH -.1            ! SMALL AIRSPACE 6 [bQ'Ir^8  
    11 PTH 4 PIN 4       ! COMPENSATOR DUPLICATES GEOMETRY iaMl>ua  
    12 xX%{i0E  
    13 AT 30 0 100       ! DUMMY TO FOLLOW BEAM WTD86A  
    13 TH -200           ! DISTANCE TO FOLD MIRROR 1 Xr o5~G  
    14 AT -30 0 100      ! RIGHT HERE  ~9YEb  
    14 GID ~Q^.7.-T  
    FOLD 1               ! IDENTIFY IT Z[!kEW  
    14    REFL              ! REFLECT THERE `E;xI v|  
    15    AT -30 0 100      ! DUMMY TO FOLLOW BEAM >`WQxkpy  
    15 TH 250            ! DISTANCE TO PRIMARY MIRROR tw 3zw`o:  
    16 RD -180 CC -1 TH -90  ! PARABOLOID HERE 1e9~):C~W  
    16 REFL              ! REFLECT THERE ^Et^,I:`  
    16    GID AH#a+<;a  
    PRIMARY M            ! IDENTIFY IT Nj?Q{ztS  
    17    AT 45 0 100       ! SMALL FOLD MIRROR s{c|J#s  
    17 REFL              ! REFLECT HERE LGtw4'yr  
    17    GID RHd no C  
    SECONDARY M          ! IDENTIFY IT B)d 4]]4\\  
    18    AT 45 0 100       ! DUMMY TO FOLLOW BEAM  !Qsjn  
    18 TH 90             ! DISTANCE TO TERTIARY ;*Mr(#R  
    19 RD -180 TH -350   ! DISTANCE TO FINAL IMAGE W3('1  
    19 REFL              ! REFLECT AT TERTIARY  `uDOIl  
    APS 19               ! THE STOP IS HERE B$OV^iwxK  
    19 GID h0x'QiCc  
    TERTIARY M 1TzwXX7  
    20 KAVkYL0  
    END

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    PANT c<Ud[x.  
    VY 19 ASPH _9=cxwi<w  
    END D#,A_GA{A  
    AANT $E8}||d  
    GSR 0 1 4 P J}bLp Z  
    END @tRDKPh  
    SYNO 10

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    SYNOPSYS AI>ASY 3
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".pQM.T  
     SPECIAL SURFACE DATA d|gfp:Z`a  
     ______________________________________________________________________________ mTL`8hv?  
      SURFACE NO.  16 -- CONIC SURFACE -) +B!"1  
      CONIC CONSTANT (CC)     -1.000000 FLG{1dS  
      SEMI-MAJOR AXIS (b) INFINITE       SEMI-MINOR AXIS (a) INFINITE Vvv;m5.  
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     _______________   SURFACE NO.  19 -- CONIC SURFACE   CONIC CONSTANT (CC)     -0.349174 wZ`*C mr  
     SEMI-MAJOR AXIS (b)   -219.999999  SEMI-MINOR AXIS (a)    177.482393 3:c6x kaw  
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     TILT AND DECENTER DATA C0^r]^$Z  
     LEFT-HANDED COORDINATES &tiJ=;R1  
     _______________________________________________________________________________ W%MS,zkAE  
     SURF TYPE            X            Y            Z     ALPHA      BETA     GAMMA U9\w)D|+eE  
     _______________________________________________________________________________ +sq_fd ;'D  
    2    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 qd'Z|'j  
    3    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 k|jr+hmn":  
    4    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 m3(p7Z^Bq  
     7 REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 fCX8s(
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     9 REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 4T~wnTH0Xg  
    13    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 B oiS  
    14    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 tHM0]Gb}  
    15    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 `O%
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    17 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 h>Z`&  
    18 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 \nTV;@F  
     KEY TO SURFACE TYPES ^ME'D  
     ____________________ *vqUOh  
     GLB  GLOBAL COORDINATES                 LOC  LOCAL COORDINATES YPKB4p#  
     REL  RELATIVE COORDINATES               REM  REMOTE TILTS IN RELATIVE COORD. [4yw? U  
     SYNOPSYS AI>

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    CHG $:A80(#+  
    13 SIN            ! NEED TWO ADDITIONAL SURFACES R
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    13 SIN d*U<Ww^q  
    4 NAS             ! REMOVE TILTS THERE NOW [e{W:7uFV  
    7 NAS 4#t-?5"  
    9 NAS Q/h-Khm
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    13 NAS  BJg  
    4 TH -3 GTB U Wn?),=WQ{  
    GE j0{Qy;wP )  
    4    AT 30 0 100        ! TILT OF BEAMSPLITTER s+=':Gcb(C  
    5    TH -.1 TRANS ;Z`R!  
    6    PTH 4 PIN 4 x2OAkkH\]i  
    7    TH 0 rrphOG  
    8    AT -30 0 100 Qf'g2 \  
    8 TRANS             ! NOT REFLECTIVE ANYMORE }iUpBn  
    8    TH -70 rP!GS _RG  
    9    REFL wAL}c(EHO  
    9    PTH -8 AIR H_aG\  
    10    AT 30 0 100 h7o.RRhK  
    10    PTH -4 PIN 4 }EJ/H3<  
    11    PTH -5 (zk/>Ou  
    12    REFL 9E[==2TO  
    12    PTH 5 &$l#0?Kc^  
    13    PTH 4 PIN 4 14 TH 0
Fw}|c  
    15 AT 30 0 100 @:>gRD  
    15 TH -200 END

#nAq~@X  
    ACON 1 NBLjBa%eL  
    HPLOT 1 2n-kJl`: O  
    PER 0 0 0 1 123 L9F71bs59  
    PUP 2 1 11 XBO( *6"E  
    PLOT 1<*U:W $g  
    RED \F""G,AWq{  
    TRA P 0 0 11 o-;/x)  
    END 7;&,LH  
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    ACON 2 lXzm)  
    APLOT 1 lWT`y  
    PER 0 0 0 1 123 rI6+St  
    PUP 2 1 11 - leYR`P  
    PLOT ZNL+w4  
    BLUE KCH`=lX  
    TRA P 0 0 11 pUW7
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    END