SYNOPSYS 光学设计软件课程四十二：复杂的干涉仪

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本课程介绍了设计干涉仪的步骤。 @?1%*/  
干涉仪有两个通道，光束在分束器处叠加。 人们经常希望看到两个波前形状的差异，就像测试非球面镜时一样。 yr=r?h}  
在该示例中，两个通道之间的条纹在其中一个反射镜的位置来回移动时给出光谱信息。 这种配置的仪器称为傅里叶变换干涉仪。 这里不关心波前的形状，而是关注其绝对相位。 yq<YGNy!  
我们将首先设置一个通道， 以下是第一步的输入：

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    RLE ,h>w%  
    ID INTERFEROMETER EXAMPLE }!d}febk_  
    WAVL 4.6 4.25 3.9 @i`g
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    OBB 0 1 30 0 0 0 30 @"~\[z5  
    1 TH 100             ! DUMMY SURFACE FOR REFERENCE z)0VP QMT  
    2 AT -45 0 100       ! SCAN MIRROR R80R{Ze  
    2 REFL )ld7^G  
    2    TH 0 [-CG&l2?L  
    3    AT -45 0 100       ! FOLD AXIS RhJ<<T.2  
    3    TH -200            ! TO BEAMSPLITTER D~y]d  
    4    TH -3 GTB U        ! THROUGH 3 MM THICK GERMANIUM O[`Ob6Q{F  
    GE uVk8KMYU  
    5 REFL               ! REFLECT AT BEAMSPLITTER _4W#6!  
    5 PTH -4 PIN 4       ! COMING BACK AGAIN -m@s 9k  
    4 AT 30 0 100        ! TILT OF BEAMSPLITTER /Mk)H d  
    7 AT 30 0 100        ! TILT AXIS UP`q6]P  
    7    TH 70              ! TO REFERENCE MIRROR ;+jp,( 7  
    8    REFL               ! HERE =&p
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    8    PTH -7             ! BACK TO BEAMSPLITTER g|zK%tR_P  
    9    AT -30 0 100       ! ENTER IT AGAIN M ?3N  
    9    PTH 4 PIN 4        ! SAME SIZE AS BEFORE 68!]q(!6F  
    10    TH -.1            ! SMALL AIRSPACE 7 dzE"m  
    11 PTH 4 PIN 4       ! COMPENSATOR DUPLICATES GEOMETRY MvW>ktkU  
    12 U;nC)'~YW9  
    13 AT 30 0 100       ! DUMMY TO FOLLOW BEAM w\mF2h  
    13 TH -200           ! DISTANCE TO FOLD MIRROR 1 J)G3Kq5>:b  
    14 AT -30 0 100      ! RIGHT HERE g\l;>  
    14 GID l<HRD  
    FOLD 1               ! IDENTIFY IT Jt)~h,68  
    14    REFL              ! REFLECT THERE Ocb2XEF  
    15    AT -30 0 100      ! DUMMY TO FOLLOW BEAM BNy"YK$  
    15 TH 250            ! DISTANCE TO PRIMARY MIRROR ep?0@5D}]  
    16 RD -180 CC -1 TH -90  ! PARABOLOID HERE
c`+ITNV  
    16 REFL              ! REFLECT THERE \1!k)PZdTW  
    16    GID Wk|z\OR(  
    PRIMARY M            ! IDENTIFY IT Zb 2  
    17    AT 45 0 100       ! SMALL FOLD MIRROR IBqY$K+l  
    17 REFL              ! REFLECT HERE z(WpOD  
    17    GID HZm i?  
    SECONDARY M          ! IDENTIFY IT !BX62j\?  
    18    AT 45 0 100       ! DUMMY TO FOLLOW BEAM 3w
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    18 TH 90             ! DISTANCE TO TERTIARY ]Rye AJ3  
    19 RD -180 TH -350   ! DISTANCE TO FINAL IMAGE 1FJ[_l  
    19 REFL              ! REFLECT AT TERTIARY rTm{-b)r  
    APS 19               ! THE STOP IS HERE 64lEB>VNm  
    19 GID W~tOH=9>  
    TERTIARY M !7oy%{L  
    20 [FL I+;gY  
    END

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    PANT [Mz;:/  
    VY 19 ASPH 62jA  
    END C6w{"[Wv=X  
    AANT vR$5ItnT  
    GSR 0 1 4 P t {"iIz_S  
    END ?nW#qy!R  
    SYNO 10

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    SYNOPSYS AI>ASY :Y>]6  
E5 oD|'=WA  
     SPECIAL SURFACE DATA u`@f~QP0  
     ______________________________________________________________________________ r%pFq1/'!  
      SURFACE NO.  16 -- CONIC SURFACE m;f?}z_\$  
      CONIC CONSTANT (CC)     -1.000000 14!J\`rI  
      SEMI-MAJOR AXIS (b) INFINITE       SEMI-MINOR AXIS (a) INFINITE "6yiQ\`J  
qD*\}b]9I  
     _______________   SURFACE NO.  19 -- CONIC SURFACE   CONIC CONSTANT (CC)     -0.349174 %>2t=)T  
     SEMI-MAJOR AXIS (b)   -219.999999  SEMI-MINOR AXIS (a)    177.482393 h&bV!M  
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     TILT AND DECENTER DATA |"qB2.[  
     LEFT-HANDED COORDINATES
T''+zk  
     _______________________________________________________________________________ C-u/{CP  
     SURF TYPE            X            Y            Z     ALPHA      BETA     GAMMA NCnId}
BT  
     _______________________________________________________________________________ /\cu!yiX  
    2    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 Lc<xgN+cJ  
    3    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 ACO4u<M)  
    4    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 a~F@3Pd  
     7 REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 _M[[vXH  
     9 REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 |HGb.^f?  
    13    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 &hN&nH"PC  
    14    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 8$ZSF92C  
    15    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 WWW#s gM%  
    17 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000  \t# 9zn>  
    18 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 Gr$*t,ZW  
     KEY TO SURFACE TYPES 9jGuelwN  
     ____________________ v\(m"|4(i  
     GLB  GLOBAL COORDINATES                 LOC  LOCAL COORDINATES xg,]M/J  
     REL  RELATIVE COORDINATES               REM  REMOTE TILTS IN RELATIVE COORD. yI.H4Dl<  
     SYNOPSYS AI>

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    CHG >Y-TwDaE  
    13 SIN            ! NEED TWO ADDITIONAL SURFACES #r.` V!=  
    13 SIN I.+)sB?5  
    4 NAS             ! REMOVE TILTS THERE NOW $Cd;0gdv  
    7 NAS B9IXa;  
    9 NAS 8;g.3Qv  
    13 NAS 7Sz'vyiz  
    4 TH -3 GTB U zc/%1  
    GE e9@fQ  
    4    AT 30 0 100        ! TILT OF BEAMSPLITTER YD46Z~$  
    5    TH -.1 TRANS cbCE $  
    6    PTH 4 PIN 4 M=[q+A  
    7    TH 0 bq3fiT9  
    8    AT -30 0 100 @y0bU*v7  
    8 TRANS             ! NOT REFLECTIVE ANYMORE 0uIV6LI  
    8    TH -70 M&djw`B  
    9    REFL 4ZJT[zi  
    9    PTH -8 AIR
SXBQ  
    10    AT 30 0 100 ~26s7S}  
    10    PTH -4 PIN 4 c > mu)('U  
    11    PTH -5 OKZam ik~  
    12    REFL lii]4k+z  
    12    PTH 5 Md>f  
    13    PTH 4 PIN 4 14 TH 0 VyoE5o  
    15 AT 30 0 100 foz5D9sQ  
    15 TH -200 END

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    ACON 1 RZd4(7H=q  
    HPLOT 1 /%uZKGP  
    PER 0 0 0 1 123 W?^8/1U  
    PUP 2 1 11 hr
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    PLOT +(<n |~  
    RED p&OJa$N$[  
    TRA P 0 0 11 )_9e@~,  
    END ST:
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!#c[~erNZ  
    ACON 2 s-GleX<  
    APLOT 1 S:p.W=TAB  
    PER 0 0 0 1 123 ;WvYzd9  
    PUP 2 1 11 fXu~69_  
    PLOT 4>$ ;gH  
    BLUE J
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    TRA P 0 0 11 Nxbd~^j  
    END