SYNOPSYS 光学设计软件课程四十二：复杂的干涉仪

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本课程介绍了设计干涉仪的步骤。 5FR#CQ  
干涉仪有两个通道，光束在分束器处叠加。 人们经常希望看到两个波前形状的差异，就像测试非球面镜时一样。 ~-zIB=TyK  
在该示例中，两个通道之间的条纹在其中一个反射镜的位置来回移动时给出光谱信息。 这种配置的仪器称为傅里叶变换干涉仪。 这里不关心波前的形状，而是关注其绝对相位。 HQP.7.w7 5  
我们将首先设置一个通道， 以下是第一步的输入：

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    RLE G*N[tw  
    ID INTERFEROMETER EXAMPLE 5bt>MoKxv
 
    WAVL 4.6 4.25 3.9 [o<hQ`&  
    OBB 0 1 30 0 0 0 30 kZG.Id  
    1 TH 100             ! DUMMY SURFACE FOR REFERENCE !vf:mMo  
    2 AT -45 0 100       ! SCAN MIRROR +u Iq]tqe  
    2 REFL t/;0/ql\  
    2    TH 0 F^gTID  
    3    AT -45 0 100       ! FOLD AXIS )7*'r@  
    3    TH -200            ! TO BEAMSPLITTER jXeE]A"  
    4    TH -3 GTB U        ! THROUGH 3 MM THICK GERMANIUM \~*<[.8~  
    GE J1}\H$*X  
    5 REFL               ! REFLECT AT BEAMSPLITTER 8Ij<t{Lps  
    5 PTH -4 PIN 4       ! COMING BACK AGAIN 5\pS8<RJ;  
    4 AT 30 0 100        ! TILT OF BEAMSPLITTER d/9YtG%q  
    7 AT 30 0 100        ! TILT AXIS =T9h7c R  
    7    TH 70              ! TO REFERENCE MIRROR eI:[o  
    8    REFL               ! HERE -Rw3[4>@O"  
    8    PTH -7             ! BACK TO BEAMSPLITTER (O+d6oT=Z2  
    9    AT -30 0 100       ! ENTER IT AGAIN <ZSXOh,'  
    9    PTH 4 PIN 4        ! SAME SIZE AS BEFORE |s! _;6  
    10    TH -.1            ! SMALL AIRSPACE 'UsR/h5T  
    11 PTH 4 PIN 4       ! COMPENSATOR DUPLICATES GEOMETRY yo#r^iAr  
    12 OY{fxBb  
    13 AT 30 0 100       ! DUMMY TO FOLLOW BEAM SvSO?H!-  
    13 TH -200           ! DISTANCE TO FOLD MIRROR 1 #1haq[Uv7  
    14 AT -30 0 100      ! RIGHT HERE %8n<#0v-|4  
    14 GID gttsxOgktH  
    FOLD 1               ! IDENTIFY IT /GGyM
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    14    REFL              ! REFLECT THERE C!^A\T7p  
    15    AT -30 0 100      ! DUMMY TO FOLLOW BEAM Vbv^@Kp  
    15 TH 250            ! DISTANCE TO PRIMARY MIRROR ,pD sU@  
    16 RD -180 CC -1 TH -90  ! PARABOLOID HERE "a[;{s{{.  
    16 REFL              ! REFLECT THERE i)e6U(H  
    16    GID &tZIWV1&  
    PRIMARY M            ! IDENTIFY IT mvjx &+q  
    17    AT 45 0 100       ! SMALL FOLD MIRROR Vx<{cHQQ  
    17 REFL              ! REFLECT HERE F[}#7}xjA  
    17    GID Em&3g  
    SECONDARY M          ! IDENTIFY IT @!")shc  
    18    AT 45 0 100       ! DUMMY TO FOLLOW BEAM ysOf=~1  
    18 TH 90             ! DISTANCE TO TERTIARY XDCm
 
    19 RD -180 TH -350   ! DISTANCE TO FINAL IMAGE *Vl#]81~  
    19 REFL              ! REFLECT AT TERTIARY Trs~KcsD  
    APS 19               ! THE STOP IS HERE W~mo*EJ'^  
    19 GID )(G<(eiD  
    TERTIARY M # QwX|x{  
    20 V5lUh#@TN&  
    END

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    PANT %q|*}l  
    VY 19 ASPH 5b"=m9{g  
    END ZOfv\(iJ;  
    AANT (m2%7f.I  
    GSR 0 1 4 P g5|&6+t.  
    END /rZk^/'  
    SYNO 10

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    SYNOPSYS AI>ASY P\Qvj7_  
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     SPECIAL SURFACE DATA |
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     ______________________________________________________________________________ >
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      SURFACE NO.  16 -- CONIC SURFACE 2T*kmDp  
      CONIC CONSTANT (CC)     -1.000000 ;cf$u}+  
      SEMI-MAJOR AXIS (b) INFINITE       SEMI-MINOR AXIS (a) INFINITE 6xx.Z3v  
&5K3AL  
     _______________   SURFACE NO.  19 -- CONIC SURFACE   CONIC CONSTANT (CC)     -0.349174 EC$F|T0f  
     SEMI-MAJOR AXIS (b)   -219.999999  SEMI-MINOR AXIS (a)    177.482393 CL2zZk{u_  
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     TILT AND DECENTER DATA |rJN  
     LEFT-HANDED COORDINATES X$==J St  
     _______________________________________________________________________________ yI8O#  
     SURF TYPE            X            Y            Z     ALPHA      BETA     GAMMA 6?}|@y^fb  
     _______________________________________________________________________________ {s@!N  
    2    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 BsXF'x<U*  
    3    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 \ &|xMw[  
    4    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 4}D&=0IZ  
     7 REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 !Dc?9W!b  
     9 REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 g.Ur~5r  
    13    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 &kdW(;`  
    14    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 sB:
e:PK  
    15    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 0* x?rO?  
    17 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 gAvNm[=wD2  
    18 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 ;PMPXN'z6  
     KEY TO SURFACE TYPES o]p$ w[5  
     ____________________ "n3n-Y#'  
     GLB  GLOBAL COORDINATES                 LOC  LOCAL COORDINATES =UO7!vr;[  
     REL  RELATIVE COORDINATES               REM  REMOTE TILTS IN RELATIVE COORD. 1y[~xxgE  
     SYNOPSYS AI>

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    CHG w\ '5lk,"  
    13 SIN            ! NEED TWO ADDITIONAL SURFACES )%Xp?H_  
    13 SIN vB7]L9=@"  
    4 NAS             ! REMOVE TILTS THERE NOW Se??E+aX  
    7 NAS lz0dt<8eP  
    9 NAS 7h/Mkim$5  
    13 NAS ~yN>9fU  
    4 TH -3 GTB U i|H^&$|  
    GE
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    4    AT 30 0 100        ! TILT OF BEAMSPLITTER -;Mh|!yg  
    5    TH -.1 TRANS hHMp=8J7  
    6    PTH 4 PIN 4 }:?_/$};  
    7    TH 0 {nZP4jze  
    8    AT -30 0 100 :p<:0W2!  
    8 TRANS             ! NOT REFLECTIVE ANYMORE {3os9r,  
    8    TH -70 s#8}&2#l  
    9    REFL (Ms #)E  
    9    PTH -8 AIR I&8!V)r)  
    10    AT 30 0 100 }cW8B"_"  
    10    PTH -4 PIN 4 qzY:>>d'  
    11    PTH -5 Or/YEt}  
    12    REFL uG.`  
    12    PTH 5 sWA-_4  
    13    PTH 4 PIN 4 14 TH 0 h{]0 H'g  
    15 AT 30 0 100 aQWg?,Ju6  
    15 TH -200 END

}e"2Nc_UG  
    ACON 1 IH=%%AS  
    HPLOT 1 Jk<b#SZ[b  
    PER 0 0 0 1 123 LD|T1.  
    PUP 2 1 11 l Hu8ADva  
    PLOT 4}Os>M{k  
    RED A9HgABhax  
    TRA P 0 0 11 M1DV9~S  
    END _}H`(d%N  
X=Y>9  
    ACON 2 d8jP@
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    APLOT 1 oXwcil  
    PER 0 0 0 1 123 %E":Wv  
    PUP 2 1 11 )Zyw^KN^  
    PLOT @`sZV8  
    BLUE vO;:~  
    TRA P 0 0 11 :$^sI"hO  
    END