SYNOPSYS 光学设计软件课程四十二：复杂的干涉仪

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本课程介绍了设计干涉仪的步骤。 p:xVi0  
干涉仪有两个通道，光束在分束器处叠加。 人们经常希望看到两个波前形状的差异，就像测试非球面镜时一样。 @@& ?,3  
在该示例中，两个通道之间的条纹在其中一个反射镜的位置来回移动时给出光谱信息。 这种配置的仪器称为傅里叶变换干涉仪。 这里不关心波前的形状，而是关注其绝对相位。 %:8XZf  
我们将首先设置一个通道， 以下是第一步的输入：

%[OZ;q& X  
    RLE cHon' tS  
    ID INTERFEROMETER EXAMPLE (H-kWT  
    WAVL 4.6 4.25 3.9 slYC\"$  
    OBB 0 1 30 0 0 0 30 OE2r2ad  
    1 TH 100             ! DUMMY SURFACE FOR REFERENCE yc0_7Im?  
    2 AT -45 0 100       ! SCAN MIRROR B<jVo%og  
    2 REFL [fg-"-+:M  
    2    TH 0 -*;JUSGh  
    3    AT -45 0 100       ! FOLD AXIS 9-EdT4=r,  
    3    TH -200            ! TO BEAMSPLITTER |3Bmsd/3  
    4    TH -3 GTB U        ! THROUGH 3 MM THICK GERMANIUM tJpK/"R'  
    GE lI;ACF^  
    5 REFL               ! REFLECT AT BEAMSPLITTER :`Xg0J+P  
    5 PTH -4 PIN 4       ! COMING BACK AGAIN W_[ tdqey  
    4 AT 30 0 100        ! TILT OF BEAMSPLITTER R_Uy.0=4  
    7 AT 30 0 100        ! TILT AXIS cG5u$B  
    7    TH 70              ! TO REFERENCE MIRROR 7w.9PNhy  
    8    REFL               ! HERE !JbWxGN`jn  
    8    PTH -7             ! BACK TO BEAMSPLITTER c"pu"t@/Z  
    9    AT -30 0 100       ! ENTER IT AGAIN ddw^oU  
    9    PTH 4 PIN 4        ! SAME SIZE AS BEFORE <X ([VZ  
    10    TH -.1            ! SMALL AIRSPACE MLN+ BuS  
    11 PTH 4 PIN 4       ! COMPENSATOR DUPLICATES GEOMETRY ^
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    12 V(0V$&qipc  
    13 AT 30 0 100       ! DUMMY TO FOLLOW BEAM M9KoQS  
    13 TH -200           ! DISTANCE TO FOLD MIRROR 1 c:2LG_mQ  
    14 AT -30 0 100      ! RIGHT HERE AL*M`m_  
    14 GID =gHUY&sPu8  
    FOLD 1               ! IDENTIFY IT SzyaVBD3  
    14    REFL              ! REFLECT THERE u6i
X&%e  
    15    AT -30 0 100      ! DUMMY TO FOLLOW BEAM #pk  
    15 TH 250            ! DISTANCE TO PRIMARY MIRROR Xn%O .yM6  
    16 RD -180 CC -1 TH -90  ! PARABOLOID HERE ,=dc-%J  
    16 REFL              ! REFLECT THERE Y,{pG]B$w  
    16    GID 1B~[L 5p9  
    PRIMARY M            ! IDENTIFY IT cg^=F
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    17    AT 45 0 100       ! SMALL FOLD MIRROR 6b\JD.r*{  
    17 REFL              ! REFLECT HERE B[fbPrM  
    17    GID =a(]@8$!1  
    SECONDARY M          ! IDENTIFY IT 4}Yn!
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    18    AT 45 0 100       ! DUMMY TO FOLLOW BEAM nTr{D&JS  
    18 TH 90             ! DISTANCE TO TERTIARY z|O3pQn~  
    19 RD -180 TH -350   ! DISTANCE TO FINAL IMAGE u|75r%p>  
    19 REFL              ! REFLECT AT TERTIARY i)7B :uA  
    APS 19               ! THE STOP IS HERE a6 w'.]m  
    19 GID ?fQ8Ff  
    TERTIARY M uVa`2]NV r  
    20 H.&"
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    END

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    PANT d t^Hd]+^\  
    VY 19 ASPH f s2}a  
    END K?*p|&Fi?8  
    AANT d?)Ic1][  
    GSR 0 1 4 P +f'@  
    END rbI 7 3'  
    SYNO 10

(;(2n;i[M  
    SYNOPSYS AI>ASY pV/5w<_x?  
r}-vOPn`E  
     SPECIAL SURFACE DATA t4+bRmS`_  
     ______________________________________________________________________________ ow*^z78M{  
      SURFACE NO.  16 -- CONIC SURFACE lA n^)EL  
      CONIC CONSTANT (CC)     -1.000000 ;:'ABfs  
      SEMI-MAJOR AXIS (b) INFINITE       SEMI-MINOR AXIS (a) INFINITE 4tz@?TCb  
t(xe*xS  
     _______________   SURFACE NO.  19 -- CONIC SURFACE   CONIC CONSTANT (CC)     -0.349174 x$.0:jP/s  
     SEMI-MAJOR AXIS (b)   -219.999999  SEMI-MINOR AXIS (a)    177.482393 S0?e/VWy  
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     TILT AND DECENTER DATA =h[;'v{  
     LEFT-HANDED COORDINATES lf_q6y  
     _______________________________________________________________________________ 7$Lt5rn"}  
     SURF TYPE            X            Y            Z     ALPHA      BETA     GAMMA ?~/_&=NSx  
     _______________________________________________________________________________ {VKP&{~O  
    2    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 gQuU_dbXSB  
    3    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 Vn?|\3KY  
    4    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 lKV7IoJ&;  
     7 REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 aMaqlqf  
     9 REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 !r4
B1fX  
    13    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 `bW0Va N  
    14    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 '25zb+-  
    15    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 oo]g=C$n  
    17 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 [#+klP$  
    18 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 w$jq2?l  
     KEY TO SURFACE TYPES Wt!8.d}=  
     ____________________ :a_MT  
     GLB  GLOBAL COORDINATES                 LOC  LOCAL COORDINATES UD_8#DO{m1  
     REL  RELATIVE COORDINATES               REM  REMOTE TILTS IN RELATIVE COORD. U,Th-
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     SYNOPSYS AI>

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    CHG G4G<Ow)`  
    13 SIN            ! NEED TWO ADDITIONAL SURFACES 0r]-Ltvl?}  
    13 SIN I?CfdI  
    4 NAS             ! REMOVE TILTS THERE NOW "O8iO!:  
    7 NAS 4Q~++PKBe  
    9 NAS xOKf|  
    13 NAS M7//*Q'?  
    4 TH -3 GTB U Y.E]U!i*  
    GE =r^Pu|  
    4    AT 30 0 100        ! TILT OF BEAMSPLITTER p)s*Cw  
    5    TH -.1 TRANS eNr2-R  
    6    PTH 4 PIN 4 0">9n9  
    7    TH 0 dl+:u}9M$  
    8    AT -30 0 100 Q'0:k{G  
    8 TRANS             ! NOT REFLECTIVE ANYMORE G1ED=N_#  
    8    TH -70 z 9~|Su  
    9    REFL _A6e|(.ll  
    9    PTH -8 AIR 2E@g#:3  
    10    AT 30 0 100 o^+g2;Ro  
    10    PTH -4 PIN 4 +4V"&S|&  
    11    PTH -5 oFp4*<\  
    12    REFL q=
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    12    PTH 5 o= &/;X  
    13    PTH 4 PIN 4 14 TH 0 3($tD*!o  
    15 AT 30 0 100 AP0z~
e  
    15 TH -200 END

E*VOyH2[  
    ACON 1 &o7"L;  
    HPLOT 1 CMU\DO  
    PER 0 0 0 1 123 s\q m  
    PUP 2 1 11 c='uyx  
    PLOT ~U1M-<IX  
    RED kD#hfYs)i  
    TRA P 0 0 11 AIt;~x  
    END !0Eo9bU%@  
0>U7]wZKc  
    ACON 2 7rIEpN>*  
    APLOT 1 CB>*(Mu  
    PER 0 0 0 1 123 Jf@~/!m}'  
    PUP 2 1 11 8WLBq-]G  
    PLOT [cw>; \J  
    BLUE M`,`2I A  
    TRA P 0 0 11 =o_zsDv  
    END