SYNOPSYS 光学设计软件课程四十二：复杂的干涉仪

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本课程介绍了设计干涉仪的步骤。 X^;LiwQv  
干涉仪有两个通道，光束在分束器处叠加。 人们经常希望看到两个波前形状的差异，就像测试非球面镜时一样。 RC| t-(Z  
在该示例中，两个通道之间的条纹在其中一个反射镜的位置来回移动时给出光谱信息。 这种配置的仪器称为傅里叶变换干涉仪。 这里不关心波前的形状，而是关注其绝对相位。 aA5rvP+  
我们将首先设置一个通道， 以下是第一步的输入：

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    RLE N$i|[>`j  
    ID INTERFEROMETER EXAMPLE 1hQeuG  
    WAVL 4.6 4.25 3.9 `Ko6;s#  
    OBB 0 1 30 0 0 0 30 lrXi*u]  
    1 TH 100             ! DUMMY SURFACE FOR REFERENCE C/{tvY /o  
    2 AT -45 0 100       ! SCAN MIRROR CQ+WBTiC  
    2 REFL R} #6  
    2    TH 0 +80yyn#  
    3    AT -45 0 100       ! FOLD AXIS `zJTVi4  
    3    TH -200            ! TO BEAMSPLITTER 9(PQ7}  
    4    TH -3 GTB U        ! THROUGH 3 MM THICK GERMANIUM s$s]D\N  
    GE C {GSf`D!T  
    5 REFL               ! REFLECT AT BEAMSPLITTER rg^  
    5 PTH -4 PIN 4       ! COMING BACK AGAIN ma<+!*|   
    4 AT 30 0 100        ! TILT OF BEAMSPLITTER -8]M ,,?  
    7 AT 30 0 100        ! TILT AXIS ??!+2G#%!  
    7    TH 70              ! TO REFERENCE MIRROR x*" 0dYH  
    8    REFL               ! HERE KF#,Q  
    8    PTH -7             ! BACK TO BEAMSPLITTER oq<n5  
    9    AT -30 0 100       ! ENTER IT AGAIN C)r!;u)AZH  
    9    PTH 4 PIN 4        ! SAME SIZE AS BEFORE )OAd[u<  
    10    TH -.1            ! SMALL AIRSPACE f;k'dqlv  
    11 PTH 4 PIN 4       ! COMPENSATOR DUPLICATES GEOMETRY 3 oG5E"G  
    12 RU1+-  
    13 AT 30 0 100       ! DUMMY TO FOLLOW BEAM Ris5)*7  
    13 TH -200           ! DISTANCE TO FOLD MIRROR 1 'NJC
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    14 AT -30 0 100      ! RIGHT HERE 7;UU
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    14 GID Q@in?};  
    FOLD 1               ! IDENTIFY IT P1Z+XRWOM  
    14    REFL              ! REFLECT THERE Q9`}dYf.  
    15    AT -30 0 100      ! DUMMY TO FOLLOW BEAM St6U  
    15 TH 250            ! DISTANCE TO PRIMARY MIRROR HW)4#nLhh  
    16 RD -180 CC -1 TH -90  ! PARABOLOID HERE k8}*b&+{vz  
    16 REFL              ! REFLECT THERE =3Y:DPMB  
    16    GID L%[om c?  
    PRIMARY M            ! IDENTIFY IT YmS}*>oz  
    17    AT 45 0 100       ! SMALL FOLD MIRROR _dT,%q  
    17 REFL              ! REFLECT HERE ` R;6]/I?  
    17    GID eJ+uP,$  
    SECONDARY M          ! IDENTIFY IT c teUKK.|)  
    18    AT 45 0 100       ! DUMMY TO FOLLOW BEAM z4snH%q  
    18 TH 90             ! DISTANCE TO TERTIARY ^b{w\HZ  
    19 RD -180 TH -350   ! DISTANCE TO FINAL IMAGE wX_s./#JJ  
    19 REFL              ! REFLECT AT TERTIARY w+P
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    APS 19               ! THE STOP IS HERE q&h&GZ  
    19 GID /5ngPHy&  
    TERTIARY M pV>M,f  
    20 +[MzF EE[  
    END

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    PANT io[$QTY  
    VY 19 ASPH q F\a]e  
    END !+;'kI2  
    AANT ~Bll\3-=  
    GSR 0 1 4 P ,qS-T'[v,(  
    END %"2;i@  
    SYNO 10


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    SYNOPSYS AI>ASY )Q_^f'4  
6R%Ra  
     SPECIAL SURFACE DATA KaJCfu yp  
     ______________________________________________________________________________ 
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      SURFACE NO.  16 -- CONIC SURFACE .^<4]  
      CONIC CONSTANT (CC)     -1.000000 J2"n:  
      SEMI-MAJOR AXIS (b) INFINITE       SEMI-MINOR AXIS (a) INFINITE 6]=$c<.&  
a9CY,+z5B  
     _______________   SURFACE NO.  19 -- CONIC SURFACE   CONIC CONSTANT (CC)     -0.349174 ]]\\Y|0  
     SEMI-MAJOR AXIS (b)   -219.999999  SEMI-MINOR AXIS (a)    177.482393 ]V,wIyC  
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     TILT AND DECENTER DATA R^`#
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     LEFT-HANDED COORDINATES l-Hp^|3Wq  
     _______________________________________________________________________________ oUMY?[Wp  
     SURF TYPE            X            Y            Z     ALPHA      BETA     GAMMA }H!l@  
     _______________________________________________________________________________ G@Z,Hbgm  
    2    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 1}A1P&2>  
    3    REL         0.00000      0.00000      0.00000  -45.0000    0.0000    0.0000 R<}n?f\#JZ  
    4    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 ;VY0DAp{  
     7 REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 a#iJXI  
     9 REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 xef@-%mcoy  
    13    REL         0.00000      0.00000      0.00000   30.0000    0.0000    0.0000 -^m]Tb<u  
    14    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 nE!h&}(  
    15    REL         0.00000      0.00000      0.00000  -30.0000    0.0000    0.0000 H pHXt78  
    17 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 1(z&0Y;  
    18 REL         0.00000      0.00000      0.00000   45.0000    0.0000    0.0000 |Co
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     KEY TO SURFACE TYPES >wiW(Ki}  
     ____________________ g5gq{KlU  
     GLB  GLOBAL COORDINATES                 LOC  LOCAL COORDINATES teO%w9ByY  
     REL  RELATIVE COORDINATES               REM  REMOTE TILTS IN RELATIVE COORD. ~J}{'l1{yf  
     SYNOPSYS AI>

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    CHG bLrC_  
    13 SIN            ! NEED TWO ADDITIONAL SURFACES *Uvh;d{  
    13 SIN Nf.6:=  
    4 NAS             ! REMOVE TILTS THERE NOW Q/oel'O*x  
    7 NAS M_wqb'=  
    9 NAS 1'c  
    13 NAS V) #vvnq  
    4 TH -3 GTB U jmgU'w-s  
    GE
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    4    AT 30 0 100        ! TILT OF BEAMSPLITTER gxry?':  
    5    TH -.1 TRANS J7FCW^-`3  
    6    PTH 4 PIN 4 Bnju_)U5)  
    7    TH 0 =D<{uovQB  
    8    AT -30 0 100 t2)S61Vr  
    8 TRANS             ! NOT REFLECTIVE ANYMORE yi7m!+D3  
    8    TH -70 5$kv,%ah  
    9    REFL 8!a6)Zeux  
    9    PTH -8 AIR Jx#r
 
    10    AT 30 0 100 9>y6zFTV  
    10    PTH -4 PIN 4 $3aq+w:  
    11    PTH -5
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    12    REFL q8U*  
    12    PTH 5 [yzDa:%  
    13    PTH 4 PIN 4 14 TH 0 GfEg][f  
    15 AT 30 0 100 ';g]!XsY)  
    15 TH -200 END

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    ACON 1 K!|%mI8gk  
    HPLOT 1 gv7(-I  
    PER 0 0 0 1 123 eK%~`Y  
    PUP 2 1 11 ich\`j[i  
    PLOT u="VJ3
 
    RED 3B }Oy$p  
    TRA P 0 0 11 a@[y)xa$Z  
    END u`Ew^-">  
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    ACON 2 NXQdyg,  
    APLOT 1 m2!y;)F0  
    PER 0 0 0 1 123 Jvysvi{8  
    PUP 2 1 11 c< ke)@  
    PLOT lM1Y }  
    BLUE |Gc2w]\3  
    TRA P 0 0 11 J1
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    END