SYNOPSYS 光学设计软件课程十三：带有Kinoform镜头的激光扩束器

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在第11课中，您了解了如何使用普通球面透镜设计激光扩束器，并了解到需要多个透镜元件才能获得良好的性能。 第12课采用相同的设计，使用两个非球面元件，效果极佳。 本课程将证明您可以使用DOE（衍射光学元件）。 m!#'4  
目标是将腰半径为0.35mm的HeNe激光器转换成直径为10mm且均匀至10％以内的光束。 w&F.LiX^  
这是我们初始的输入文件：

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    RLE                ! Beginning of lens input file. 。 !pTi.3  
    ID KINOFORM BEAM SHAPER m-u3^\'  
    WA1 .6328               ! Single wavelength j3=%J5<  
    UNI MM           ! Lens is in millimeters sH_B*cr3  
    OBG .35 1          ! Gaussian object; waist radius -.35 mm; define full aperture = 1/e**2 point. 6~b)Hc/  
    1    TH 22          ! Surface 2 is 22 mm from the waist . Rq`d I~5!b  
    2    RD -2 TH 2 GTB S ! Guess some reasonable lens parameters; use glass type SF6 from Schott catalog ?cur}`  
    SF6 W*.j=?)\[  
    3    TH 20          ! Surface 3 is a kinoform on side 2 of the first element y).dw(  
    3 USS 16          ! Defined as Unusual Surface Shape 16 (simple DOE) %H/V iC  
    CWAV .6328      ! Zones are defined as one wave phase change at this wavelengt /
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    HIN 1.7988 55      ! Assume the zones are machined into the lens.  You can also apply  ! a film of a different index. X^o0t^  
    RNORM 1 ! mb<z^>5  
to,\sc  
    4 TH 2 GTB S O n/q&h5  
    SF6 'Bx"i  
    4 USS 16 \0fS;Q^{j  
    CWAV .6328 W#Eg\nT  
    HIN 1.7988 55 5.M82rR;~  
    RNORM 1 8.WZC1N  
         ! The first side of the second element is also a DOE _<^mi!Y  
    5 CV 0 TH 50      ! Start with a flat surface ~8 S2BV3@  
    7               ! Surfaces 6 and 7 exist >S}^0vNZX  
    AFOCAL           ! because they are required for AFOCAL output. (/$a*$  
    END           ! End of lens input file.

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    PANT      ! Start of variable parameter definitions. )dh_eqnX  
    RDR .001     ! This is a very small beam, so use smaller derivative increments to start with VY Um%$TGw5  
    2 RAD $97EeE:{M  
    VLIST TH 3  ! Vary the airspace 2A&Y})D  
    VY 3 G 26     ! Vary term Y**2, B%(-UTQf  
    VY 3 G 27     ! Y**4, rO[ Zx'a  
    VY 3 G 28     ! and Y**6 %X -G(Z  
'*=kt  
    VY 4 G 26     ! Do the same at surface 4 s;W1YN  
    VY 4 G 27 GUcGu5tw:  
    VY 4 G 28 ZTzh[2u*  
dV7~C@k6k8  
    END  j|owU  
!SAR/sdXf  
    AANT           ! Start of merit function definition kWZ/O  
    AEC Z(c2F]  
    ACC aTFT'(O,  
    LUL 150 1 1 A TOTL      ! Prevent the system from growing too large
~8tb^  
    M 5 1 A P YA 0 0 1 0 5     ! Ask for a beam radius of 5 mm on surface 5 'Ivr=-  
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    M 0 1 A P FLUX 0 0 1 0 6 ! Ask for a flux falloff of zero at several zones T{
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    M 0 1 A P FLUX 0 0 .98 0 6 Om5+j:YM  
    M 0 1 A P FLUX 0 0 .97 0 6 JW9U&Bj
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    M 0 1 A P FLUX 0 0 .96 0 6 ;@s'JSPt  
    M 0 1 A P FLUX 0 0 .95 0 6 ICm/9Onh&  
    M 0 1 A P FLUX 0 0 .94 0 6 EZ)$lw/!J  
    M 0 1 A P FLUX 0 0 .93 0 6 J_N`D+m  
    M 0 1 A P FLUX 0 0 .92 0 6 XAb-K?)  
    M 0 1 A P FLUX 0 0 .91 0 6 #G\;)pT  
    M 0 1 A P FLUX 0 0 .85 0 6 hZ~\Z S7  
    M 0 1 A P FLUX 0 0 .8 0 6 8omk4 ;  
        M 0 1 A P FLUX 0 0 .7 0 6 ByivV2qd{  
    M 0 1 A P FLUX 0 0 .5 0 6 ~T:L0||.%9  
    M 0 1 A P FLUX 0 0 .3 0 6 MD,+>kh  
    GSO 0 .1 10 P           ! Control the output ray OPD over an SFAN of 10 rays, aP`V  
    GSR 0 100 10 P          ! and some transverse aberrations too. CAtdx!  
    END                ! End of merit function definition. ^k}%k#)  
    SNAP =x-@-\m  
    SYNO 40

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    FLUX 100 P 6

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    M    50 .01 A P HSFREQ 0 0 1 0 4

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    DPROP P 0 0 3 SURF 3 L RESAMPLE

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DPROP P 0 0 6 SURF 3 L RESAMPLE

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    RLE p}9bZKyf  
    ID KINOFORM BEAM SHAPER !)+8:8H'  
     FNAME 'L13L1.RLE                                         ' <ecif_a=m  
     MERIT   0.270980E-05 +"F9yb  
     WA1 .6328000 0PT\/imgN  
     WT1 1.00000 k+`e0Jago  
     APS               1 %eQw\o,a  
     AFOCAL e sDd>W  
     UNITS MM |}2X|4&X  
     OBG   0.35000000       1.0000000 VtzX I2.2  
    0    AIR ;.|).y1/`  
    1    CV      0.0000000000000   TH     22.00000000 AIR _NkbB"+L  
    2    RAD     -0.8227781050995   TH      2.00000000 tZqy \_G  
       2 N1 1.79881710 uwhb-.w  
       2 CTE   0.810000E-05 6y}|IhX?z  
    2    GTB S    'SF6             ' a@}A;y'd  
    3    CV      0.0000000000000   TH     74.00214849 AIR ZINqIfc  
       3 USS  16 HL34pmc  
     CWAV        0.632800 _7Rp.)[&  
     HIN        1.798800       55.000000 xji2#S%  
       RNORM    1.00000 a^QyYX}\qR  
       3 XDD  1   0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00 t8\XOj  
       3 XDD  2   0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00 *9I/h~I  
       3 XDD  3   2.6875641E+02  5.7065730E+01 -4.1566734E+01  2.8677115E+01 -1.6241740E+01 8
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    3    XDD  4   4.7211923E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00 5*IfI+}  
    4    CV      0.0000000000000   TH      2.00000000 g}Esj"7  
       4 N1 1.79881710 ZA Xw=O5  
       4 CTE   0.810000E-05 Yk!TQY4  
       4 GTB S    'SF6             ' T~JE.Y3B3  
       4 USS  16 w|0w<K  
     CWAV        0.632800 [(PD2GO+  
     HIN        1.798800       55.000000 ^;gwD4(hs  
       RNORM    1.00000 1Kc[).O1  
       4 XDD  1   0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00 ~T'Ri=  
       4 XDD  2   0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00  0.0000000E+00 0Z<&M|G  
       4 XDD  3   5.6803879E+00 -9.1936550E-03  6.0997390E-04 -5.7203063E-05  2.2090382E-06 Qkq9
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    4    XDD  4  -3.5824860E-08  0.0000000E+00  0.0000000E+00  0.0000000E+00 mH\eJ  
    5    RAD   -159.6274584523634   TH     50.00000000 AIR >4@/x{{  
    6    CV      0.0000000000000   TH      0.00000000 AIR fBRU4q=^T  
    7    CV      0.0000000000000   TH      0.00000000 AIR  END