| yazhuge |
2005-10-21 19:57 |
Refractive projection objective（折射投影物镜）--版主继续革命！！
Abstract "'3QKeM 1
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. GZ 1c~uAu
-------------------------------------------------------------------------------- ZH)thd9^b
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) 7pO/!Lm
Correspondence Name and Address: SUGHRUE MION, PLLC 1|WrJ-Uf
2100 PENNSYLVANIA AVENUE, N.W. !g[UFw
SUITE 800 e_+SBN1`P&
WASHINGTON jZgCDA8Mr!
DC R ~? 9 +
20037 G`r/ te sW
US h $)4%Fy
cqG&n 0zb
Assignee Name and Adress: CARL ZEISS SMT AG |hD)=sCj
~.$ca.Gf
Serial No.: 931051 cT| aQM@iW
Series Code: 10 LI9
Uc\
Filed: September 1, 2004 #i 5@G*
! B/5@P
U.S. Current Class: 359/649 VmON}bb[zz
U.S. Class at Publication: 359/649 E?(:9#02
Intern'l Class: G02B 003/00; G02B 009/00 tjJi|
U>hpYqf_
-------------------------------------------------------------------------------- R*O<(
q0*d*j F0u
Foreign Application Data 5H2Ugk3
b *Ca*!
-------------------------------------------------------------------------------- M*Ri1
Date Code Application Number avb'dx *q>
Sep 12, 2003 WO 03/075049 A2
JN-W`2
Feb 6, 2003 WO PCT/EP03/01147 534DAhpD=.
Sep 12, 2003 WO 03/075096 A2 B8 r#o=q1
KkZS 6rD\
-------------------------------------------------------------------------------- 4W<8 u(
GhR% f xe
Claims 85rj M#~
ldWrv7. P
-------------------------------------------------------------------------------- 'MQJt2QU9{
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. xM_+vN *(
!'(QF9%Q
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. lnnT_[ni.
/DX6Hkkj %
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
|
|