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yazhuge 2005-10-21 19:57

Refractive projection objective(折射投影物镜)--版主继续革命!!

Abstract BhKO_wQ?:J  
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. Xv0F:1  
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) -!c IesK;<  
Correspondence Name and Address:     SUGHRUE MION, PLLC 91u p^   
  2100 PENNSYLVANIA AVENUE, N.W. @\)fzubu  
  SUITE 800 $uCiXDKCq  
  WASHINGTON .Gh%p`<  
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  20037 ]:&n-&@L  
  US o/cr{>"N  
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Assignee Name and Adress: CARL ZEISS SMT AG >AG^fUArH  
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Serial No.: 931051  %[`a  
Series Code: 10 S[mM4et|  
Filed: September 1, 2004 DLi?'K3t  
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U.S. Current Class: 359/649 rB%y6P B  
U.S. Class at Publication: 359/649 jWvtv ng  
Intern'l Class: G02B 003/00; G02B 009/00 Nb;H`<JP  
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Foreign Application Data SfW}"#L>5  
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Date Code Application Number 1fFj:p./l_  
Sep 12, 2003 WO 03/075049 A2 5G(E&>~  
Feb 6, 2003 WO PCT/EP03/01147 x<ax9{  
Sep 12, 2003 WO 03/075096 A2 *C6D3y  
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Claims s-rfS7;  
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1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. gR Nv-^  
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2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. riCV&0"n  
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3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
一条龙 2005-10-21 20:38
再谢啦斑竹!
xiaoniu 2005-10-22 08:24
呵呵,谢谢楼主分享!!!!
y00102 2005-10-23 09:36
look look   what `s it ?
focus 2005-10-24 10:06
look look   what `s it ?
skyfeather 2005-10-24 10:27
非常感谢斑竹哦!
shark 2005-10-24 13:15
have a look
ASAP 2005-10-24 20:32
呵呵,谢谢楼主分享!!!!
flwing 2005-10-25 10:03
看看,谢谢楼主!!!
爱是一道光 2005-10-25 11:17
厉害!!!!顶!!!!
lookzpf 2005-10-25 13:30
再谢啦斑竹!
birdy 2005-10-25 20:50
let me look
nestle 2005-10-29 23:17
文化要共享
King8218 2005-11-01 17:00
have a look!!
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