yazhuge |
2005-10-21 19:57 |
Refractive projection objective(折射投影物镜)--版主继续革命!!
Abstract ] <y3;T\~ Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. 3bK=Q3N -------------------------------------------------------------------------------- '{F
Od_uk% Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) s $?u'}G3 Correspondence Name and Address: SUGHRUE MION, PLLC aUyJi 2100 PENNSYLVANIA AVENUE, N.W. J,_IHzO~Z SUITE 800 ~E3"s WASHINGTON +9NI=s6 DC eFz!`a^dX 20037 j\%m6\{n| US dz"HO!9 (@3?JJ]1 Assignee Name and Adress: CARL ZEISS SMT AG 7: .bqRu d$<1Ma} Serial No.: 931051 $1.l| Series Code: 10 JrJTIUf_ Filed: September 1, 2004 &B@qb?UE1
3F\UEpQ U.S. Current Class: 359/649 _>/OqYR_jQ U.S. Class at Publication: 359/649 ;Ebpf J Intern'l Class: G02B 003/00; G02B 009/00 [h@MA| x67,3CLy? -------------------------------------------------------------------------------- z\6/?5D#v |7:{vA5 Foreign Application Data gH[lpRu|7 B[{Ie
G' -------------------------------------------------------------------------------- W<OO:B.ty Date Code Application Number c
6$n: Sep 12, 2003 WO 03/075049 A2 InfUH8./t Feb 6, 2003 WO PCT/EP03/01147 5imqZw Sep 12, 2003 WO 03/075096 A2 Sp~gY]: ^#,cWG}z -------------------------------------------------------------------------------- :}[[G2|9 yL%k5cO$N Claims S$%Y{ HHaerc -------------------------------------------------------------------------------- v}^
f8nVR 1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. 90]{4 ]y; !|;w(/ 2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. 3I.0uLjg^ K$Yc!4M 3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
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