| yazhuge |
2005-10-21 19:57 |
Refractive projection objective（折射投影物镜）--版主继续革命！！
Abstract \Mf>X\}
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. M` MxdwR
-------------------------------------------------------------------------------- 4{VO:(geZ
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) Z6!Up1
Correspondence Name and Address: SUGHRUE MION, PLLC |tXA$}"L8
2100 PENNSYLVANIA AVENUE, N.W. K$E3RB_F
SUITE 800 TBlSZZ-55]
WASHINGTON q"2QNF'
DC 9&mSF0q
20037 "c^! LV
US N0`9/l r|
R @e'=z[%1
Assignee Name and Adress: CARL ZEISS SMT AG H]TdW;ZbZ
MP]<m7669*
Serial No.: 931051 'yo@5*x7
Series Code: 10 ofvR0yV
Filed: September 1, 2004 t,/ G
"*g+qll!5d
U.S. Current Class: 359/649 z8kO)'
U.S. Class at Publication: 359/649 K)Y& I
Intern'l Class: G02B 003/00; G02B 009/00 Qg> NJ\*Q
Psb !Z(
-------------------------------------------------------------------------------- 7ZcF0h
|vI*S5kn6A
Foreign Application Data 5Qgu:)}
|IxHtg3>6{
-------------------------------------------------------------------------------- TnW`#.f
Date Code Application Number `oRyw6Sko
Sep 12, 2003 WO 03/075049 A2 kVn RSg}R
Feb 6, 2003 WO PCT/EP03/01147 V&Y`?Edc
Sep 12, 2003 WO 03/075096 A2 n@p]v*
>e]g T
-------------------------------------------------------------------------------- #2Rz=QI
UQVL)-Z
Claims pEyZH !W
yOM/UdWq
-------------------------------------------------------------------------------- YAi-eL67l
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1.
Dy08.Sss
- t-f&`S||
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. *v<f#hB"
?Y=aO(}=h
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
|
|