yazhuge |
2005-10-21 19:57 |
Refractive projection objective(折射投影物镜)--版主继续革命!!
Abstract 6xfG`7Az Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. e/S^Rx4W -------------------------------------------------------------------------------- @20~R/vh Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) R\VM6>SN'S Correspondence Name and Address: SUGHRUE MION, PLLC Lc0yLm 2100 PENNSYLVANIA AVENUE, N.W. 0/Q"~H?% SUITE 800 Z{#;my*X| WASHINGTON Tw)"#Y!T DC ,sn/FT^; q 20037 Po+tk5}''5 US cag9f?w@V F|ib=_)3 Assignee Name and Adress: CARL ZEISS SMT AG Xfq]vQ/{ !uno!wUIYd Serial No.: 931051 vWM'}( Series Code: 10 XyM?Dc5, Filed: September 1, 2004 `/1Zy}cD [u=DAk?8 U.S. Current Class: 359/649 Gkfc@[Z V U.S. Class at Publication: 359/649 4_A9o9&_Rh Intern'l Class: G02B 003/00; G02B 009/00 p| #gn<z} $ZQ?E^> B -------------------------------------------------------------------------------- guD?~-Q wG&+*,} Foreign Application Data limzDQ^ te+5@k#t -------------------------------------------------------------------------------- i"rrM1/r
Date Code Application Number kP6P/F|RcZ Sep 12, 2003 WO 03/075049 A2 HxVQeyOR Feb 6, 2003 WO PCT/EP03/01147 M?UlC
Sep 12, 2003 WO 03/075096 A2 &<u
pj b [|sKu#yW -------------------------------------------------------------------------------- z"eh.&T :*2+t- Claims oadlyqlw# d E@R7yU@ -------------------------------------------------------------------------------- mX8A XWIa 1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. zr0_SCh;2 ZOFBT(oV 2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. S|A?z)I %Km_Sy[7'] 3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
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