yazhuge |
2005-10-20 17:19 |
Optical system alignment system and method with high accuracy and simple operati
Optical system alignment system and method with high accuracy and simple operation ^7(zoUn: TIS}'c'C Abstract qD%Jf4.0j A system for aligning of optical components includes an interferometer and a first diffractive alignment element. A housing is used for positioning a first optical element being aligned. A detector is used for detecting fringes produced by reflections off surfaces of the first optical element. A grating pattern on the first diffractive alignment element is designed to produce a retro-reflected wavefront or a wavefront transmitted or reflected in a predetermined direction when the first optical element is in alignment. The first diffractive alignment element includes a first region for alignment of the interferometer, a second region for alignment of one surface of the first optical element, and a third region for alignment of another surface of the first optical element. The first, second and third regions can be of any shape such as circular, rectangular, triangular, or the like. #j@Su )+ -------------------------------------------------------------------------------- JL]6o8x Inventors: Harned, Robert D.; (Redding, CT) ; Harned, Nora-Jean; (Redding, CT) w;X-i.%` Correspondence Name and Address: STERNE, KESSLER, GOLDSTEIN & FOX PLLC 4).q+{#k 1100 NEW YORK AVENUE, N.W. "5vFa7y WASHINGTON h8n J$jg DC KSLyU1W 20005 C7PHZ`< US L8!xn&uyP= \5J/? rNZN}g Assignee Name and Adress: ASML Holding N.V. KaOS!e' Veldhoven [
h%ci3 NL 8on2BC2 ji">} - [_${N,1 Serial No.: 938954 m%m8002 Series Code: 10 p=eSHs{>A Filed: September 13, 2004 Al
0zL h4ZrD:D0\ U.S. Current Class: 356/508 sHKT]^7 U.S. Class at Publication: 356/508 A`IE8@&Z' Intern'l Class: G01B 009/02 I,.>tC g,9o'fs`x -------------------------------------------------------------------------------- n;4`IK| 8j8FQ!M Claims wz;IKdk[ oc>,5 x -------------------------------------------------------------------------------- < | |