回帖：AMICM: A high-precision grating metrology framework via interpretable machine learning and scatterometry
bairuizheng回帖于2026-06-27 00:23
下一楼›：上海光机所在可解释机器学习光栅参数计量研究中取得进展
(tomryo)‹上一楼：研究团队提出注意力增强多特征可解释CatBoost模型AMICM。该方法基于-1级衍射效率光谱，融合时域 ..
(jeremiahchou)
